Wavefront and light intensity characteristics of continous phase plated fabricated by magnetorheological finishing

This paper analyzes characteristics of wavefront and light intensity of large-aperture continuous phase plates(CPPs) fabricated by magnetorheological finishing(MRF). Three groups of CPPs fabricated by different processing parameters such as scanning intervals and scanning offsets are compared, and the influence of mid-frequency error introduced by MRF on CPPs wavefront and light intensity are analyzed as well. Total analysis indicates that the performance of CPP is poor when scanning interval is 2 mm and scanning offsets are 0.1-0.3 mm; The iteration fabrication efficiency is higher when scanning interval is 2 mm and scanning offsets are 0.4-0.5 mm compared with that when scanning interval is 1 mm and scanning offsets are 0.1-0.3 mm, and the mid-frequency error is improved as well. Further analysis indicates that mid-frequency error introduced by MRF has a greater impact on CPPs wavefront gradient, near-field and side lobe.