Meniscus coating and thickness measurement of photoresist

Lin Jiping; Liang Juxi; Liu Zhengkun; Wang Qingbo; Bao Jianguang; Hong Yilin; Fu Shaojun

doi:10.11884/HPLPB201426.101017

Volume 26 Issue 10

Sep. 2014

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Article Navigation > High Power Laser and Particle Beams > 2014 > 26(10): 101017

Chen Xipu, Luo Tianluo, Hu Zhimin. Monte Carlo simulation of proton response of Timepix detectors[J]. High Power Laser and Particle Beams, 2025, 37: 022001. doi: 10.11884/HPLPB202537.240199

Citation:

Lin Jiping, Liang Juxi, Liu Zhengkun, et al. Meniscus coating and thickness measurement of photoresist[J]. High Power Laser and Particle Beams, 2014, 26: 101017. doi: 10.11884/HPLPB201426.101017

Chen Xipu, Luo Tianluo, Hu Zhimin. Monte Carlo simulation of proton response of Timepix detectors[J]. High Power Laser and Particle Beams, 2025, 37: 022001. doi: 10.11884/HPLPB202537.240199

Citation:

Lin Jiping, Liang Juxi, Liu Zhengkun, et al. Meniscus coating and thickness measurement of photoresist[J]. High Power Laser and Particle Beams, 2014, 26: 101017. doi: 10.11884/HPLPB201426.101017

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Meniscus coating and thickness measurement of photoresist

doi: 10.11884/HPLPB201426.101017

1.
National Synchrotron Radiation Lab,University of Science and Technology of China,Hefei 230029,China;
2.
School of Physics and Material Science,Anhui University,Hefei 230601,China

Received Date: 2014-05-22
Rev Recd Date: 2014-07-16
Publish Date: 2014-09-23

Abstract

Abstract

In order to realize uniform coating of photoresist on large area substrates, a small meniscus coating applicator is designed and assembled, and it is used to coat a substrate of 200 mm200 mm. Then a thickness measurement system based on white light interference spectrometer is installed to measure the thickness distribution of the coated photoresist, the result shows that the peak value of the deviation is less than 5%. Thickness uniformity is analyzed for further optimizing the coating system and coating parameters. Finally the accuracy of the thickness measurement system is tested by comparing the measuring results with that of a surface profiler which has very high resolution and has been calibrated, and the deviation is less than 0.8%.
- meniscus coating,
- large area coating,
- white light interference,
- thickness measurement,
- uniformity

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