Algorithm for correcting quantization error in phase measuring profilometry

Zhao Jing; Wu Wei; Zheng Xiaojun; Liu Kai

doi:10.11884/HPLPB201426.111005

Volume 26 Issue 11

Sep. 2015

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Zhao Jing, Wu Wei, Zheng Xiaojun, et al. Algorithm for correcting quantization error in phase measuring profilometry[J]. High Power Laser and Particle Beams, 2014, 26: 111005. doi: 10.11884/HPLPB201426.111005

Citation:

Zhao Jing, Wu Wei, Zheng Xiaojun, et al. Algorithm for correcting quantization error in phase measuring profilometry[J]. High Power Laser and Particle Beams, 2014, 26: 111005. doi: 10.11884/HPLPB201426.111005

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Algorithm for correcting quantization error in phase measuring profilometry

doi: 10.11884/HPLPB201426.111005

1.
School of Electrical Engineering and Information,Sichuan University,Chengdu 610064,China;
2.
College of Electronics and Information Engineering,Sichuan University,Chengdu 610064,China;
3.
Sichuan Institute of Quality Supervision and Inspection,Chengdu 610100,China

Received Date: 2014-05-15
Rev Recd Date: 2014-06-15
Publish Date: 2014-11-04

Abstract

Abstract

In order to decrease the quantization effect caused by quantization process of digital devices, we propose a method to reduce the quantization error for phase measuring profilometry (PMP). The proposed method is suitable for the measurement of high precision and the surface has little change in bump. Each pixel of the calculated phase can be corrected according to neighborhood pixels. The experiment result shows that the standard deviation of phase quantization error decreases 41.38% after correction. The accuracy of phase measurement is improved.
- phase measuring profilometry,
- quantization,
- phase quantization error,
- error correction,
- neighborhood pixels