Influence of radio frequency power on structure and property of carbon-deuterium glow discharge polymer films

Carbon-deuterium polymer films were fabricated at different powers by the discharge polymerization technology. The difference of chemical structures was characterized by FT-IR. The content of deuterium of films was characterized by element analysis and the hardness and modulus of films were measured by nanoindentation. It was found that with the RF power increasing, the D contents in the films firstly increased, then decreased, and reached to the biggest at 10 W. The CD bands content increased, while the CD2 bands content decreased. The hardness and modulus of films decreased when the RF power increased.