Studies of fabrication Mo coatings on microsphere surface by magnetron sputtering

Mo coatings on microspheres surface were fabricated by magnetron sputtering with different conditions. Using white light interference instrument and scanning electron microscope, the cross section and surface morphology of the samples were studied. The effects of working pressure and sputtering time on the morphology of Mo coatings were investigated. The result shows that Mo coatings with a thickness from 3.5 m to 14.1 m can be fabricated on microspheres surface, all of the coating thicknesses are uniform. The coatings show highly packed microstructures, with coating thickness increased, the interspaces between different grains increase.