Fabrication of single-crystal diamond micro-cupped resonators based on laser ablation

A novel 3-D fabrication process of micro-cupped resonators (MCR) using single-crystal diamond (SCD) is presented based on laser ablation. The high elastic modulus, low thermal elastic damping and large acoustic velocity of diamond make SCD an ideal material for micro and nanomechanical resonators. But diamond is difficult to shape for different application with the traditional machining method for its high hardness and chemical stability. Laser ablation is a better choice for higher accuracy, better structural symmetry, greater speed, and lower breakage rate. UV laser high precision processing machine has been employed for the ablation of SCD to study the effect of laser beam parameters on ablation quality. A better structure symmetry is acquired through optimized laser parameters, reasonably design of structure and trajectories of laser ablation so that the MCR has a potential advantage for micro-cupped gyroscope.