Fabrication of microprobe based on NOA73 and SU-8

Wang Wei; Jia Zhihao; Duan Junping; Cui Jianli; Xu Suping; Zhang Binzhen

doi:10.11884/HPLPB201527.024103

Volume 27 Issue 02

Jan. 2015

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Wang Wei, Jia Zhihao, Duan Junping, et al. Fabrication of microprobe based on NOA73 and SU-8[J]. High Power Laser and Particle Beams, 2015, 27: 024103. doi: 10.11884/HPLPB201527.024103

Citation:

Wang Wei, Jia Zhihao, Duan Junping, et al. Fabrication of microprobe based on NOA73 and SU-8[J]. High Power Laser and Particle Beams, 2015, 27: 024103. doi: 10.11884/HPLPB201527.024103

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Fabrication of microprobe based on NOA73 and SU-8

doi: 10.11884/HPLPB201527.024103

Wang Wei^1,2,
Jia Zhihao^1,2,
Duan Junping^1,2,
Cui Jianli^1,2,
Xu Suping^1,2,
Zhang Binzhen^{1,2
,
,}

1.
Science and Technology on Electronic Test &Measurement Laboratory,North University of China,Taiyuan 030051,China;
2.
Key Laboratory of Instrumentation Science &Dynamic Measurement,North University of China,Ministry of Education,Taiyuan 030051,China

Received Date: 2014-09-14
Rev Recd Date: 2014-10-13
Publish Date: 2015-01-27

Abstract

Abstract

Fabrication of microprobe integrated with a UV-curable adhesive, NOA73 microspheres and SU-8 micro pillars is presented, which can be applied to coordinate measurement machine (CMM) as a key component. The NOA73 microsphere is formed by the interfacial tension between NOA73 and other solution, the pillar is formed from SU-8 deep ultraviolet lithography. The glycerol is coated for compensating the refractive index difference between NOA73 and air, thus UV light still keep parallel, after propagating through the NOA73 microspheres. The high aspect ratio microprobe is obtained with the height above 1 200 m and the angle between micro-pillar and substrate is 89.
- probe,
- coordinate measuring machine,
- refractive index compensation,
- MEMS

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