Fabrication of microprobe based on NOA73 and SU-8

Fabrication of microprobe integrated with a UV-curable adhesive, NOA73 microspheres and SU-8 micro pillars is presented, which can be applied to coordinate measurement machine (CMM) as a key component. The NOA73 microsphere is formed by the interfacial tension between NOA73 and other solution, the pillar is formed from SU-8 deep ultraviolet lithography. The glycerol is coated for compensating the refractive index difference between NOA73 and air, thus UV light still keep parallel, after propagating through the NOA73 microspheres. The high aspect ratio microprobe is obtained with the height above 1 200 m and the angle between micro-pillar and substrate is 89.