Volume 27 Issue 02
Jan.  2015
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Article Navigation >  High Power Laser and Particle Beams  > 2015  >  27(02): 024103
Lei Chunxia, Ren Yunpeng, Gan Yong, et al. Effect of optical properties on the thermal responses of copper films induced by ultrafast lasers[J]. High Power Laser and Particle Beams, 2017, 29: 071006. doi: 10.11884/HPLPB201729.170017
Citation: Wang Wei, Jia Zhihao, Duan Junping, et al. Fabrication of microprobe based on NOA73 and SU-8[J]. High Power Laser and Particle Beams, 2015, 27: 024103. doi: 10.11884/HPLPB201527.024103
shu

Fabrication of microprobe based on NOA73 and SU-8

doi: 10.11884/HPLPB201527.024103
  • 1.

    Science and Technology on Electronic Test &Measurement Laboratory,North University of China,Taiyuan 030051,China;

  • 2.

    Key Laboratory of Instrumentation Science &Dynamic Measurement,North University of China,Ministry of Education,Taiyuan 030051,China

  • Received Date: 2014-09-14
  • Rev Recd Date: 2014-10-13
  • Publish Date: 2015-01-27
    Abstract
  • Fabrication of microprobe integrated with a UV-curable adhesive, NOA73 microspheres and SU-8 micro pillars is presented, which can be applied to coordinate measurement machine (CMM) as a key component. The NOA73 microsphere is formed by the interfacial tension between NOA73 and other solution, the pillar is formed from SU-8 deep ultraviolet lithography. The glycerol is coated for compensating the refractive index difference between NOA73 and air, thus UV light still keep parallel, after propagating through the NOA73 microspheres. The high aspect ratio microprobe is obtained with the height above 1 200 m and the angle between micro-pillar and substrate is 89.
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