Volume 27 Issue 02
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Yang Jisen, Pan Weimin, Wang Honglei, et al. Digital self-excited vertical test system of superconducting cavity[J]. High Power Laser and Particle Beams, 2020, 32: 045106. doi: 10.11884/HPLPB202032.190320
Citation: Ren Xinyu, Jian Aoqun, Duan Qianqian, et al. Improvement and simulation model validation of nano-grating coupler based on SOI structure[J]. High Power Laser and Particle Beams, 2015, 27: 024123. doi: 10.11884/HPLPB201527.024123
shu

Improvement and simulation model validation of nano-grating coupler based on SOI structure

doi: 10.11884/HPLPB201527.024123
  • 1.

    MicroNano System Research Center,Taiyuan University of Technology,Taiyuan 030024,China

  • Received Date: 2014-09-22
  • Rev Recd Date: 2014-11-20
  • Publish Date: 2015-01-27
    Abstract
  • A novel nano-grating coupler based on silicon-on-insulator structure is proposed to solve the mismatch issue between the silicon-based optical waveguide and the single-mode fiber. According to the principle of collimation, the structure model and characteristics of the nano-grating coupler are investigated by using the finite-difference time-domain method. Optiwave OptiFDTD 8.0 software is used to investigate the factors related to the coupling efficiency, such as the incident wavelength, the incident angle, the grating cycle, the grating duty ratio, the etching depth, the buried-oxide layer thickness and so on. Optimum parameters of the grating structure are obtained. The structure is optimized by adding the rear reflector, the antireflective film and the bottom dielectric reflector on the base of the basic grating. The maximum coupling efficiency of the grating coupler is up to 59.37% with a 3 dB bandwidth of 65 nm.
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