High performance integrated micro-fabricated pre-concentrator based on MEMS

Sun Jianhai; Ning Zhanwu; Ma Tianjun; Zhu Xiaofeng; Cui Dafu; Zhang Lulu; Li Hui; Chen Xing

doi:10.11884/HPLPB201527.024124

Volume 27 Issue 02

Jan. 2015

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Article Navigation > High Power Laser and Particle Beams > 2015 > 27(02): 024124

Xiao Dengjie, Qiao Yusi, Chu Zhongming. Orbit correction based on machine learning[J]. High Power Laser and Particle Beams, 2021, 33: 054004. doi: 10.11884/HPLPB202133.200352

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Sun Jianhai, Ning Zhanwu, Ma Tianjun, et al. High performance integrated micro-fabricated pre-concentrator based on MEMS[J]. High Power Laser and Particle Beams, 2015, 27: 024124. doi: 10.11884/HPLPB201527.024124

Xiao Dengjie, Qiao Yusi, Chu Zhongming. Orbit correction based on machine learning[J]. High Power Laser and Particle Beams, 2021, 33: 054004. doi: 10.11884/HPLPB202133.200352

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High performance integrated micro-fabricated pre-concentrator based on MEMS

doi: 10.11884/HPLPB201527.024124

1.
State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100190,China;
2.
Beijing Municipal Institute of Labour Protection,Beijing 100054,China

Received Date: 2014-10-22
Rev Recd Date: 2014-11-19
Publish Date: 2015-01-27

Abstract

Abstract

The concentration of most environmental samples is very low. In order to directly detect these samples, an integrated micro pre-concentrator, which can significantly improve detection limit of mini gas chromatography system with 1-2 orders, is developed. The micro pre-concentrator has 4 parallel channels filled with enough Tenax-TA as adsorbent materials for concentrating volatile organic compounds. For closing the released components during thermal desorption process, a micro-valve is integrated behind the pre-concentrator. The result demonstrates the proposed pre-concentrator can effectively concentrate components with a concentration factor of 15. Moreover, the chromatography peak broadening is greatly compressed under controlling by the micro-valve. Therefore, the micro-fabricated pre-concentrator can be easy to deploy and suitable for a number of applications involving on-site monitoring of environmental samples.
- micro pre-concentrator,
- concentration factor,
- mini-gas chromatography system,
- detection limit

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