Wang Haibo, Zhang Ruzhao, Zou Hailong, et al. MEMS based electro-conjugate fluid micropump[J]. High Power Laser and Particle Beams, 2015, 27: 024128. doi: 10.11884/HPLPB201527.024128
Citation:
Wang Haibo, Zhang Ruzhao, Zou Hailong, et al. MEMS based electro-conjugate fluid micropump[J]. High Power Laser and Particle Beams, 2015, 27: 024128. doi: 10.11884/HPLPB201527.024128
Wang Haibo, Zhang Ruzhao, Zou Hailong, et al. MEMS based electro-conjugate fluid micropump[J]. High Power Laser and Particle Beams, 2015, 27: 024128. doi: 10.11884/HPLPB201527.024128
Citation:
Wang Haibo, Zhang Ruzhao, Zou Hailong, et al. MEMS based electro-conjugate fluid micropump[J]. High Power Laser and Particle Beams, 2015, 27: 024128. doi: 10.11884/HPLPB201527.024128
In order to overcome the deficiency in the fabrication of triangular prism slit (TPS) electrode pairs with ultrathick and high aspect ratio, to obtain a jet generator with good appearance and in that way improve the output performance of electro-conjugate fluid (ECF) micropump, several optimization measures for the fabrication of TPS electrode pairs based on MEMS technology are proposed. By repeating experiment and improvement based on theoretical analysis, structural optimization of slit electrode, optimized process parameter for spin coating, heat treatment, development and a novel removal method for KMPR negative photoresists are utilized. Finally, the jet generator with thickness of almost 500 m and high aspect ratio of TPS electrode pairs are fabricated successfully. The tip of triangular prism electrode has unbroken structure and the slit electrode attaches to the conductor layer well. Moreover, a prototype of ECF micropump is designed and assembled for next experimental study.
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