Niu Zhifeng, Guo Jianzeng, Zhou Xiaohong. Simulation and compensation of wavefront aberration caused by deformable mirror thermal deformation[J]. High Power Laser and Particle Beams, 2015, 27: 011010. doi: 10.11884/HPLPB201527.011010
Citation: Wen Cai, Li Xiaohong, He Xiaoqing, et al. Microstructuring and doping of monocrystalline silicon with femtosecond and nanosecond laser pulses[J]. High Power Laser and Particle Beams, 2015, 27: 024143. doi: 10.11884/HPLPB201527.024143

Microstructuring and doping of monocrystalline silicon with femtosecond and nanosecond laser pulses

doi: 10.11884/HPLPB201527.024143
  • Received Date: 2014-09-24
  • Rev Recd Date: 2014-11-02
  • Publish Date: 2015-01-27

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      沈阳化工大学材料科学与工程学院 沈阳 110142

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