Time of flight mass spectrum diagnosis for pulsed plasma

According to the characteristics of and application requirements for pulsed plasma, a time of flight mass spectrometry diagnosis system for pulsed plasma has been developed using orthogonal-injection, grid reflecting and two-stage space focusing method. The mass resolution, the range of detecting energy, and the time resolution are about 1690 (FWHM), 3-150 eV and about 0.45 s respectively. The important characters, such as ion mass spectrometry and ion energy distribution function, have been achieved by time of flight mass spectrometry researching and analyzing of typical pulsed plasma. The dominating components are Tin+ ions with different charge state, and the most probable energies of Ti+ and Ti2+ ions are nearly 23 eV and 48 eV respectively.