Electron-beam-pumped XeCl excimer laser and application

To obtain high energy ultraviolet laser pulse, the XeCl excimer laser pumped by electron-beam was studied. This paper describes the construction and the principle of the XeCl excimer laser with electron-beam pump source in detail. Experimental study on laser output characteristic of the XeCl excimer laser was carried out, and effects on pressure of mix gas in laser chamber on output energy were shown. The energy of the laser pulse of 200 ns duration at half-amplitude exceeded 100 J under conditions of 81 kV charge voltage of laser and a befitting composition of gas mixture at a total pressure of 200 kPa, and the laser efficiency, calculated relative to all the energy deposited in the active volume, was 3.2%. The experimental research on impulse coupling produced by XeCl excimer laser (308 nm) interaction with the coating layer was performed. Impulse coupling was measured by the subminiature impulse detector, and impulse coupling coefficient was calculated for different air pressure. The impulse coupling coefficient under ambient air, which was 8.3210-5 NW-1, was about twice that under vacuum condition.