Impact of polishing process parameters on the low frequency surface accuracy of fused silica optics

Wang Hongxiang; Zhu Benwen; Chen Xianhua; Hou Jing; Wang Jinghe

doi:10.11884/HPLPB201527.042001

Volume 27 Issue 04

Mar. 2015

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Article Navigation > High Power Laser and Particle Beams > 2015 > 27(04): 042001

Wei Huiling, Cao Jianyong, Yu Peixuan, et al. Development of ion source discharge chamber for the 5 MW neutral beam heating line on HL-2M device[J]. High Power Laser and Particle Beams, 2020, 32: 046001. doi: 10.11884/HPLPB202032.190275

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Wang Hongxiang, Zhu Benwen, Chen Xianhua, et al. Impact of polishing process parameters on the low frequency surface accuracy of fused silica optics[J]. High Power Laser and Particle Beams, 2015, 27: 042001. doi: 10.11884/HPLPB201527.042001

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Impact of polishing process parameters on the low frequency surface accuracy of fused silica optics

doi: 10.11884/HPLPB201527.042001

1.
School of Mechanical Electrical Engineering,Harbin Institute of Technology,Harbin 150001,China;
2.
Research Center of Laser Fusion,CAEP,Mianyang 621900,China

Received Date: 2014-09-24
Rev Recd Date: 2015-01-12
Publish Date: 2015-03-23

Abstract

Abstract

Based on the relative motion of the workpiece and polishing dish, using the material removal model of fused silica optics, the influence of speed ratio and eccentricity on material removal function was analyzed, and the influence of polishing process parameters on the low frequency surface accuracy was studied by theoretical analysis and polishing experiments. Low frequency surface errors were detected using high-resolution detection equipment, preferred polishing process parameters were obtained, and the corresponding experiment was done for verification, an appropriate method was proposed to improve the low-frequency surface accuracy of fused silica optics in the polishing process.
- fused silica optics,
- polishing process,
- process parameters,
- surface accuracy,
- surface quality

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