Central buoyant MEMS vector hydrophone of low-frequency and high sensitivity

Liu Yuan; Wang Lijuan; Guo Nan; Zhao Long; Zhang Wendong; Zhang Guojun

doi:10.11884/HPLPB201527.054102

Volume 27 Issue 05

Apr. 2015

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Article Navigation > High Power Laser and Particle Beams > 2015 > 27(05): 054102

Liu Xudong, Yang Yi, Bai Li, et al. Preparation and properties of AlMg alloy film by thermal evaporation for Z-pinch[J]. High Power Laser and Particle Beams, 2016, 28: 022002. doi: 10.11884/HPLPB201628.022002

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Liu Yuan, Wang Lijuan, Guo Nan, et al. Central buoyant MEMS vector hydrophone of low-frequency and high sensitivity[J]. High Power Laser and Particle Beams, 2015, 27: 054102. doi: 10.11884/HPLPB201527.054102

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Central buoyant MEMS vector hydrophone of low-frequency and high sensitivity

doi: 10.11884/HPLPB201527.054102

Liu Yuan^1,2,
Wang Lijuan^1,2,
Guo Nan^1,2,
Zhao Long^1,2,
Zhang Wendong^1,2,
Zhang Guojun^{1,2
,
,}

1.
Key Laboratory of Instrumentation Science &Dynamic Measurement of Ministry of Education,North University of China,Taiyuan 030051,China;
2.
Science and Technology on Electronic Test &Measurement Laboratory,North University of China,Taiyuan 030051,China

Received Date: 2015-01-15
Rev Recd Date: 2015-02-09
Publish Date: 2015-04-24

Abstract

Abstract

The MEMS bionic vector hydrophone developed by North University of China has advantages of low frequency, miniaturization, high sensitivity, etc. But the sensitivity of the hydrophone is still low for detecting the week acoustic signals. How to enhance the sensitivity is a critical problem to the future developments. So a type of central buoyant microstructure is proposed, expecting to improve the sensitivity. And based on the acoustic research, the parameters of the central buoyant sphere is finally determined. The influences of the central buoyant microstructure on the sensitivity and the frequency band are analyzed by static analysis and fluid-structure interaction respectively. In order to verify the feasibility and performance, the hydrophone is tested in the standing wave field and in the real environment. Results show that the sensitivity of the hydrophone is -175 dB, the frequency ranges from 20 Hz to 500 Hz, which satisfies the requirement of detecting the ship radiation noise over a long distance, and the fluctuation range of frequency response curve is 1.5 dB. The directivity pattern of 8-shape is good(48.8 dB).
- vector hydrophone,
- low frequency,
- central buoyancy,
- sensitivity,
- fluid structure interaction

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