Mathematical model and experiment for preparing uniform film by PLD on large surface

Because plasma generated through laser ablation takes on a Gaussian form, dimensional distribution of quantity and kinetic energy of particles are terribly uneven, its difficult to prepare large area films with uniform thickness and performance by pulse laser deposition. In our study, a translation device was designed, the shifting velocity of the rotational substrate increased gradually while approaching the center of plasma, whereas decreased gradually while departing in order to obtain a uniform film. The math model of influence of motion parameters on thickness of the film was founded. Finally, through simulation and optimization, the uniform diamond-like carbon film with diameter of 200 mm and thickness variation below 4% was prepared by pulse laser deposition.