Mathematical model and experiment for preparing uniform film by PLD on large surface

Lu Yimin; Wang Shuyun; Guo Yanlong; Huang Guojun; Cheng Yong; Tian Fangtao

doi:10.11884/HPLPB201527.071007

Volume 27 Issue 07

Jun. 2015

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Ma Tianjun, Sun Jianhai, Hao Baoliang, et al. Microfabrication of folded waveguide using UV-LIGA for 220 GHz traveling wave tube[J]. High Power Laser and Particle Beams, 2015, 27: 024101. doi: 10.11884/HPLPB201527.024101

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Lu Yimin, Wang Shuyun, Guo Yanlong, et al. Mathematical model and experiment for preparing uniform film by PLD on large surface[J]. High Power Laser and Particle Beams, 2015, 27: 071007. doi: 10.11884/HPLPB201527.071007

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Mathematical model and experiment for preparing uniform film by PLD on large surface

doi: 10.11884/HPLPB201527.071007

1.
Opto-Electronics Facility,Wuhan Ordnance Non-Commissioned Officers Academy,Wuhan 430075,China

Received Date: 2015-01-11
Rev Recd Date: 2015-05-09
Publish Date: 2015-06-23

Abstract

Abstract

Because plasma generated through laser ablation takes on a Gaussian form, dimensional distribution of quantity and kinetic energy of particles are terribly uneven, its difficult to prepare large area films with uniform thickness and performance by pulse laser deposition. In our study, a translation device was designed, the shifting velocity of the rotational substrate increased gradually while approaching the center of plasma, whereas decreased gradually while departing in order to obtain a uniform film. The math model of influence of motion parameters on thickness of the film was founded. Finally, through simulation and optimization, the uniform diamond-like carbon film with diameter of 200 mm and thickness variation below 4% was prepared by pulse laser deposition.
- pulsed laser deposition,
- large planar surface,
- uniform film,
- diamond-like carbon film

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