Effect of binary pseudo-random grating and step on system transfer function calibration of interferometric measurement system

Deng Yan; Wang Xiangfeng; Ji Baojian; Shi Qikai

doi:10.11884/HPLPB201527.071010

Volume 27 Issue 07

Jun. 2015

Turn off MathJax

Article Contents

Abstract

References

Article Navigation > High Power Laser and Particle Beams > 2015 > 27(07): 071010

Cui Bo, He Shukai, Liu Hongjie, et al. Neutron spectrum measurement for picosecond laser pulse neutron source experiment with liquid scintillator detector[J]. High Power Laser and Particle Beams, 2016, 28: 124005. doi: 10.11884/HPLPB201628.160414

Citation:

Deng Yan, Wang Xiangfeng, Ji Baojian, et al. Effect of binary pseudo-random grating and step on system transfer function calibration of interferometric measurement system[J]. High Power Laser and Particle Beams, 2015, 27: 071010. doi: 10.11884/HPLPB201527.071010

Citation:

PDF( 7439 KB)

Effect of binary pseudo-random grating and step on system transfer function calibration of interferometric measurement system

doi: 10.11884/HPLPB201527.071010

1.
Chengdu Fine Optical Engineering Research Center,Chengdu 610041,China

Received Date: 2014-12-23
Rev Recd Date: 2015-03-25
Publish Date: 2015-06-23

Abstract

Abstract

Using standard phase structures with high quality is the precondition for accurate calibration of system transfer function(STF) of the interferometric measurement system, which guarantees the accurate measurement of the optical wavefront or surface informations in the mid and high spatial frequency bands. Two types of typical standard phase structures are simulated and analyzed, one is the binary pseudo-random(BPR) grating, and the other is the step. According to the comparison of the effect of the fabrication imperfections on the measurement of system transfer function between the BPR grating and the step, more reliable calibration of the STF in mid and high spatial frequency bands can be obtained using BPR grating as the standard, when the error parameters are the same. The changes of the corresponding PSD are also analyzed, when the BPR grating is oversampled or undersampled by CCD, the PSD will decline with the frequency, and the effect of sampling on the STF calibration can be removed by modifying the height distribution of the theoretical BPR grating.
- interferometric measurement system,
- system transfer function,
- binary pseudo-random grating,
- step,
- power spectrum density,
- mid and high spatial frequency,
- fabrication imperfection

FullText(HTML)

References(0)

References

Relative Articles

[1]	Peng Zhitao, Chen Fengdong, Tang Jun, Liu Guodong, Yuan Haoyu, Zhu Qihua. Extracting multi-scale laser damage in optics on difference of Gaussian filter[J]. High Power Laser and Particle Beams, 2017, 29(09): 091003. doi: 10.11884/HPLPB201729.170066
[2]	Yi Qiang, Huang Qiushi, Wang Xiangmei, Yang Yang, Zhang Zhong, Wang Zhanshan, Xu Rongkun, Peng Taiping, Zhou Hongjun, Huo Tonglin. Narrow-band Si/Mo/C multilayer mirrors working at 13 nm[J]. High Power Laser and Particle Beams, 2016, 28(12): 122002. doi: 10.11884/HPLPB201628.160440
[3]	Guo Xingyue, Liu Yang, Zhou Haijing. Application of parallel time domain electric field integral equation to two-dimensional electromagnetic scattering from time-evolving ocean surfaces[J]. High Power Laser and Particle Beams, 2015, 27(10): 103216. doi: 10.11884/HPLPB201527.103216
[4]	Xu Ke, Chen Xing, Wang Hao. Multi-physics simulation for analyzing high power microwave electromagnetic effect of electromagnetic system[J]. High Power Laser and Particle Beams, 2014, 26(07): 073220. doi: 10.11884/HPLPB201426.073220
[5]	He Shifeng, Tu Yuchun, Feng Zhixiang, Yue Shuaipeng, Wang Fengli, Zhu Jingtao. Stress analysis of high reflective multilayers fabricated by magnetron sputtering[J]. High Power Laser and Particle Beams, 2014, 26(05): 054002. doi: 10.11884/HPLPB201426.054002
[6]	Zong Xianzheng, Nie Zaiping, Qing Tao, He Shiquan, Song Naitao. Applications of mode-matching and integral equation method to HPM simulation research[J]. High Power Laser and Particle Beams, 2014, 26(06): 063017. doi: 10.11884/HPLPB201426.063017
[7]	Chen Shangbi, Sheng Bin, Qiu Keqiang, Liu Zhengkun, Xu Xiangdong, Liu Ying, Hong Yilin, Fu Shaojun. Cleaning method for improving laser induced damage threshold of multilayer dielectric pulse compressor gratings[J]. High Power Laser and Particle Beams, 2012, 24(11): 2631-2636. doi: 10.3788/HPLPB20122411.2631
[8]	tan moyan, zhu jingtao, wang zhanshan. Design of reflective multilayer polarizers in extreme ultraviolet range using different merit functions[J]. High Power Laser and Particle Beams, 2011, 23(04): 0- .
[9]	wang bingjian, lu gang, huang yang, li qing, qin hanlin. Multimodal image registration algorithm based on Shape Context and scale-invariant feature transform[J]. High Power Laser and Particle Beams, 2011, 23(12): 28-29.
[10]	qing tao, nie zaiping, ma lianfeng, he shiquan, zong xianzheng. Solving excitation-transmission-radiation problems in beam waveguide by using integral equation[J]. High Power Laser and Particle Beams, 2011, 23(11): 0- .
[11]	pan lei, wang xiaoqiang, zhang zhong, zhu jingtao, wang zhanshan, li yizhou, li hongjie, wang daorong, zhao juyan, lu wei. Fabrication of high uniformity Mo/Si multilayer with 120 mm diameter using magnetron sputtering[J]. High Power Laser and Particle Beams, 2010, 22(07): 0- .
[12]	li ming, zhang bin, dai yaping, wang tao, fan zhengxiu. Tolerance of ion beam etching on multilayer dielectric thin film reflector for spectrum reshaping[J]. High Power Laser and Particle Beams, 2009, 21(05): 0- .
[13]	zhang hui-jing, zhang zhong, zhu jing-tao, bai liang, chen rui, huang qiu-shi, liu li-qin, tan mo-yan, wang feng-li, wang zhan-shan, chen ling-yan. Design and fabrication of high reflectivity Mo/B4C multilayer mirrors[J]. High Power Laser and Particle Beams, 2008, 20(01): 0- .
[14]	hou li-fei, yi rong-qing, du hua-bing, liu shen-ye, zhu jing-tao, zhao yi-dong, cui ming-qi. Reflectivity calibration of soft X-ray multilayer mirror in Beijing Synchrotron Radiation Facility[J]. High Power Laser and Particle Beams, 2007, 19(12): 0- .
[15]	dai li, xie zheng, luo jian-shu, chen zhi, li chuan-lu. Analytical method of multi-level shielding electromagnetic topological diagram[J]. High Power Laser and Particle Beams, 2006, 18(09): 0- .
[16]	lan lan, yang li ming, lin xiao dong, qiu fu min, chen jian guo. Reflection delay expression of light wave reflected by multilayer dielectric coatings[J]. High Power Laser and Particle Beams, 2003, 15(07): 0- .
[17]	jin chun-shui, lin qiang, ma yue-ying, pei shu, cao jian-lin. Study of uniform soft X-ray multilayers deposition technology[J]. High Power Laser and Particle Beams, 2003, 15(05): 0- .
[18]	wang wei, ni yuan-long, wan bing-gen, sun jin-ren, wu jiang, wang chen, sun yu-qin, zhou guan-lin, gu yuan, wang shi-ji. Single-shot measurement of soft X-ray Mo/Si multi-layer mirror reflectance[J]. High Power Laser and Particle Beams, 2001, 13(05): 0- .

Supplements(0)

Cited By

Cited by

Periodical cited type(2)

1.	齐伟，贺书凯，崔波，张智猛，洪伟，赵宗清，谷渝秋，周维民. 超短脉冲激光驱动束靶中子源产生及应用研究进展（特邀）. 中国激光. 2024(01): 92-104 .
2.	崔波，张智猛，戴曾海，齐伟，邓志刚，黄华，贺书凯，王为武，滕建，张博，刘红杰，陈家斌，肖云青，吴笛，马文君，洪伟，粟敬钦，周维民，谷渝秋. 基于多反应通道的高产额激光中子源实验研究. 强激光与粒子束. 2021(09): 123-129 . 本站查看