Design of angular multiplexing decoding optical path for high power excimer laser system

According to angular multiplexing technique, a multiplexing decoding method is presented. In this method, multiplexing decoding is achieved by two steps: in the first step the beams between the layers are decoded, and in the second step the beams in each layer are decoded. The optical elements are arranged in rectangular arrays and piled layer by layer. A specific optical design was made for the 18 beams XeCl high power excimer laser system in our laboratory. For this multiplexing decoding method, decoding accuracy is adjustable, compatibility with alignment and measurement is good, and optical structures are easy to fabricate and assemble.