Fabrication of polarization independent gratings made on multilayer dielectric thin film substrates

Shen Biyao; Zeng Lijiang; Li Lifeng; Yan Hong

doi:10.11884/HPLPB201527.111013

Volume 27 Issue 11

Nov. 2015

Turn off MathJax

Article Contents

Article Navigation > High Power Laser and Particle Beams > 2015 > 27(11): 111013

Shen Biyao, Zeng Lijiang, Li Lifeng, et al. Fabrication of polarization independent gratings made on multilayer dielectric thin film substrates[J]. High Power Laser and Particle Beams, 2015, 27: 111013. doi: 10.11884/HPLPB201527.111013

Citation:

Shen Biyao, Zeng Lijiang, Li Lifeng, et al. Fabrication of polarization independent gratings made on multilayer dielectric thin film substrates[J]. High Power Laser and Particle Beams, 2015, 27: 111013. doi: 10.11884/HPLPB201527.111013

Citation:

PDF( 471 KB)

Fabrication of polarization independent gratings made on multilayer dielectric thin film substrates

doi: 10.11884/HPLPB201527.111013

1.
Department of Precision Instrument,State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084,China;
2.
Institute of Applied Electronics,CAEP,P.O.Box 919-1002,Mianyang 621900,China

Received Date: 2015-07-23
Rev Recd Date: 2015-09-27
Publish Date: 2015-10-27

Abstract

Abstract

We briefly present design parameters and fabrication procedures of polarization independent gratings made on multilayer dielectric thin film substrates for spectral beam combining applications. In the wavelength range of 1.044 m to 1.084 m the -1st Littrow order average diffraction efficiencies of TE polarization and TM polarization are 89.7% and 93.8% respectively.
- diffraction grating,
- polarization independent grating,
- multilayer dielectric grating,
- spectral beam combining