Atmosphere pressure plasma cleaning of grease contamination on sol-gel SiO₂ coating

Atmosphere pressure plasma cleaning was utilized to clean grease contamination on the surface of sol-gel SiO2 coating on K9 glass. The optical property and laser-induced damage threshold of sol-gel coating were investigated by spectrophotometer, scanning electrical microscope and infrared spectrometer, respectively. After cleaning, the laser-induced damage threshold increased from 16.08 J/cm2 to 24.41 J/cm2 with irradiated by 1064 nm, approximate to the laser-induced damage threshold before pollution. The experimental results showed that the grease contamination on the sol-gel SiO2 coating could be well cleaned by atmosphere pressure plasma jet without the coating damaged and contamination residual by properly controlling the technological parameters.