Atmosphere pressure plasma cleaning of grease contamination on sol-gel SiO<sub>2 </sub>coating

Liu Hao; Miao Xinxiang; Yang Ke; Lv Haibing; Zou Rui; Zhou Guorui; Cheng Xiaofeng; Yan Hongwei; Yuan Xiaodong; Jia Baoshen

doi:10.11884/HPLPB201527.112008

Volume 27 Issue 11

Nov. 2015

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Article Navigation > High Power Laser and Particle Beams > 2015 > 27(11): 112008

Liu Yuan, Wang Lijuan, Guo Nan, et al. Central buoyant MEMS vector hydrophone of low-frequency and high sensitivity[J]. High Power Laser and Particle Beams, 2015, 27: 054102. doi: 10.11884/HPLPB201527.054102

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Liu Hao, Miao Xinxiang, Yang Ke, et al. Atmosphere pressure plasma cleaning of grease contamination on sol-gel SiO₂coating[J]. High Power Laser and Particle Beams, 2015, 27: 112008. doi: 10.11884/HPLPB201527.112008

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Atmosphere pressure plasma cleaning of grease contamination on sol-gel SiO₂coating

doi: 10.11884/HPLPB201527.112008

1.
Research Center of Laser Fusion,CAEP,P.O.Box 919-988,Mianyang 621900,China

Received Date: 2015-07-22
Rev Recd Date: 2015-09-11
Publish Date: 2015-10-27

Abstract

Abstract

Atmosphere pressure plasma cleaning was utilized to clean grease contamination on the surface of sol-gel SiO2 coating on K9 glass. The optical property and laser-induced damage threshold of sol-gel coating were investigated by spectrophotometer, scanning electrical microscope and infrared spectrometer, respectively. After cleaning, the laser-induced damage threshold increased from 16.08 J/cm2 to 24.41 J/cm2 with irradiated by 1064 nm, approximate to the laser-induced damage threshold before pollution. The experimental results showed that the grease contamination on the sol-gel SiO2 coating could be well cleaned by atmosphere pressure plasma jet without the coating damaged and contamination residual by properly controlling the technological parameters.
- atmosphere pressure plasma jet,
- sol-gel SiO2 coating,
- vacuum system of high power laser,
- grease contamination,
- laser induced damage threshold

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