Ion beam post-processing effect on laser induced damage of diamond-like carbon film

The low laser damage threshold of the diamond like carbon film seriously restricts its application in the infrared laser system. Un-balanced magnetron sputtering was used to deposit a diamond-like carbon (DLC) film on Si substrates. The DLC film was bombarded and processed by ion beam technique, and the main influencing effect factors of the ion beam were determined by the orthogonal experiment method. The DLC films were treated based on the parameters of the ion beam. The optical constants and Raman spectra of the DLC films were observed, and the laser induced damage threshold was performed. It can be seen that the transmittance increased from 60.65% to 65.98%, the extinction coefficient decreased obviously after 900 nm, and the laser damage threshold of the DLC film increased from 0.69 J/cm2 to 1.01 J/cm2.