Multi-parameter integrated measuring method for nano-scale surface profile of diamond tool

Yue Xiaobin; Xu Min; Cui Hailong; Lei Dajiang; Zhang Xiaofeng

doi:10.11884/HPLPB201527.114102

Volume 27 Issue 11

Nov. 2015

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Article Navigation > High Power Laser and Particle Beams > 2015 > 27(11): 114102

Li Haibo, Shen Li, Zhai Jun, et al. Nanosecond grade edge chopper power supply system of high current proton accelerator[J]. High Power Laser and Particle Beams, 2017, 29: 085001. doi: 10.11884/HPLPB201729.170086

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Yue Xiaobin, Xu Min, Cui Hailong, et al. Multi-parameter integrated measuring method for nano-scale surface profile of diamond tool[J]. High Power Laser and Particle Beams, 2015, 27: 114102. doi: 10.11884/HPLPB201527.114102

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Multi-parameter integrated measuring method for nano-scale surface profile of diamond tool

doi: 10.11884/HPLPB201527.114102

1.
Department of Optical Science and Engineering,Fudan University,Shanghai 200433,China;
2.
Institute of Mechanical Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China;
3.
Shanghai Ultra-Precision Optical Manufacturing Engineering Center,Department of Optical Science and Engineering,Fudan University,Shanghai 200433,China

Received Date: 2015-08-25
Rev Recd Date: 2015-09-17
Publish Date: 2015-10-27

Abstract

Abstract

Due to lack of complete set of testing equipment and methods, and no unified evaluation parameters at present, the tool quality can not be comprehensively and systematically tested. The paper proposes a method that can test the roughness value, sharpness value and the range of micro-defect of diamond tool at the same time based on the atomic force microscope and ultra precision aerostatic bearings. In order to meet the measurement requirements for the surface profile of the diamond tools, the measurement system is constructed based on the atomic force microscope, the vibration isolation platform, the 2D mobile platform and the ultra precision aerostatic bearings. The surface morphology of the cutting edge of diamond tool is accurately measured. The roughness value, sharpness value and the range of micro-defect of diamond tool are accurately extracted by special measurement software. The measurement errors are analyzed and the control requirements are proposed. The test system based on above analysis can achieve comprehensive evaluation of multi-parameters, and laid the foundation for the quality evaluation of diamond tool in ultra-precision machining.
- atomic force microscope,
- diamond tool,
- surface profile quality,
- multi-parameter integrated measurement

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