Improvement of film thickness uniformity in meniscus coating

Lin Jiping; Liu Zhengkun; Hong Yilin; Jiang Xiaolong; Qiu Keqiang; Liu Ying; Xu Xiangdong; Fu Shaojun

doi:10.11884/HPLPB201527.121003

Volume 27 Issue 12

Jan. 2016

Turn off MathJax

Article Contents

Abstract

References

Article Navigation > High Power Laser and Particle Beams > 2015 > 27(12): 121003

Lin Jiping, Liu Zhengkun, Hong Yilin, et al. Improvement of film thickness uniformity in meniscus coating[J]. High Power Laser and Particle Beams, 2015, 27: 121003. doi: 10.11884/HPLPB201527.121003

Citation:

Lin Jiping, Liu Zhengkun, Hong Yilin, et al. Improvement of film thickness uniformity in meniscus coating[J]. High Power Laser and Particle Beams, 2015, 27: 121003. doi: 10.11884/HPLPB201527.121003

Lin Jiping, Liu Zhengkun, Hong Yilin, et al. Improvement of film thickness uniformity in meniscus coating[J]. High Power Laser and Particle Beams, 2015, 27: 121003. doi: 10.11884/HPLPB201527.121003

Citation:

Lin Jiping, Liu Zhengkun, Hong Yilin, et al. Improvement of film thickness uniformity in meniscus coating[J]. High Power Laser and Particle Beams, 2015, 27: 121003. doi: 10.11884/HPLPB201527.121003

PDF( 2400 KB)

Improvement of film thickness uniformity in meniscus coating

doi: 10.11884/HPLPB201527.121003

1.
National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029,China;
2.
School of Physics and Material Science,Anhui University,Hefei 230601,China

Received Date: 2015-09-14
Rev Recd Date: 2015-10-09
Publish Date: 2015-11-26

Abstract

Abstract

It is difficult to coat photoresist uniformly on large plates for diffraction optics component fabrication. The relationship between photoresist thickness and scan velocity is experimentally explored by a small meniscus coating applicator. Aside from the thickness, the distribution uniformity of the thickness is also important and is experimentally found it is mainly dependent on system stability. Firstly, the relationship between the thickness uniformity and the scan velocity is explored and optimized. Secondly, interspace variations during the scan process with different coating parameters are measured in situ using a non-contact laser triangulation sensor, it is limited to 15 m in the scan process. Several variation reduction measures are adopted. After parameter optimization and system improvement, the photoresist is uniformly coated with a peak-to-valley (PV) value of 3% and a root-mean-square deviation of 0.5% to fabricate diffractive optic plates.
- meniscus coating,
- large area diffractive optic plates,
- photoresist uniformity coating

FullText(HTML)

References(0)

References

Relative Articles

[1]	Wang Ruijie, Liu Hongwei, Wang Lingyun, Gao Bin, Zhang Dongdong, Yuan Jianqiang. Development of nanosecond pulsed power supply for large-area dielectric barrier discharges[J]. High Power Laser and Particle Beams, 2025, 37(4): 045006. doi: 10.11884/HPLPB202537.240434
[2]	Ding Baiwen, Hao Jianhong, Zhang Fang, Zhao Qiang, Fan Jieqing, Dong Zhiwei. Simulation and source design of large area uniform bremsstrahlung field[J]. High Power Laser and Particle Beams, 2024, 36(12): 124003. doi: 10.11884/HPLPB202436.240175
[3]	Zhong Tiancheng, Chen Lin, Guo Fan, Zou Wenkang, Wang Meng, Xie Weiping. Initial design of a low-impendence large-area-bremsstrahlung diode coupled with coaxial MITL[J]. High Power Laser and Particle Beams, 2017, 29(06): 065002. doi: 10.11884/HPLPB201729.170004
[4]	Huang Zhongliang, Xu Qifu, Lai Dingguo, Yang Shi, Yang Li, Qiu Mengtong, Cong Peitian, Ren Shuqing, Wang Qiang. A low impedance large surface diode[J]. High Power Laser and Particle Beams, 2016, 28(01): 014005. doi: 10.11884/HPLPB201628.014005
[5]	Xia Junming, Sun Hailong, Huo Wenqing, Xu Yuemin, Sun Yueqiang, Bai Weihua, Liu Congliang, Meng Xiangguang. Effects of pressure on the pulsed magnetic confinement linear hollow cathode discharge[J]. High Power Laser and Particle Beams, 2015, 27(08): 084005. doi: 10.11884/HPLPB201527.084005
[6]	Lu Yiru, Zhang Chen, Ruan Jiufu, Yang Jun, Deng Guangsheng, Lv Guoqiang. Internal stress of photoresists for microfabrication of THz full-metal grating[J]. High Power Laser and Particle Beams, 2015, 27(11): 113101. doi: 10.11884/HPLPB201527.113101
[7]	Lu Yimin, Wang Shuyun, Guo Yanlong, Huang Guojun, Cheng Yong, Tian Fangtao. Mathematical model and experiment for preparing uniform film by PLD on large surface[J]. High Power Laser and Particle Beams, 2015, 27(07): 071007. doi: 10.11884/HPLPB201527.071007
[8]	Li Jinxi, Wu Wei, Lai Dingguo, Cheng Yinhui, Ma Liang, Zhao Mo, Guo Jinghai, Zhou Hui. Calculation of pulse X-ray spectrum field generated by intense diode[J]. High Power Laser and Particle Beams, 2014, 26(03): 035005. doi: 10.3788/HPLPB201426.035005
[9]	Lin Jiping, Liang Juxi, Liu Zhengkun, Wang Qingbo, Bao Jianguang, Hong Yilin, Fu Shaojun. Meniscus coating and thickness measurement of photoresist[J]. High Power Laser and Particle Beams, 2014, 26(10): 101017. doi: 10.11884/HPLPB201426.101017
[10]	Zong Fangke, Yang Qinlao, Gu Li, Li Xiang, Zhang Jingjin. Design of large-format X-ray framing image tube[J]. High Power Laser and Particle Beams, 2012, 24(10): 2386-2390. doi: 10.3788/HPLPB20122410.2386
[11]	liu zengyi, lin zulun, wang xiaoju, cao guichuan, qi kangcheng. Characteristics of lanthanum hexaboride thin film cathode deposited on large area substrate[J]. High Power Laser and Particle Beams, 2011, 23(04): 0- .
[12]	tang ying, yi ai-ping, liu jing-ru, qian hang, huang xin, yu li, su jian-cang, ding zhen-jie, ding yong-zhong, yu jian-guo. Experimental study on generation of large area uniform electron beam[J]. High Power Laser and Particle Beams, 2007, 19(06): 0- .
[13]	chen shao-wu, wang qun-shu, zhao hong, shao bi-bo, wang fei, yuwen cui-lei, zhang jian-min. On-line parameters measurement method for high energy laser with large beam profile[J]. High Power Laser and Particle Beams, 2006, 18(10): 0- .
[14]	lin zu-lun, cao gui-chuan, zhang yi-de, chen ze-xiang, qi kang-cheng. Large area ring-shaped LaB6 cathode[J]. High Power Laser and Particle Beams, 2006, 18(02): 0- .
[15]	yang an-min, wu deng-xue, liu chen-jun, xia lian-sheng, wang wen-dou, zhang kai-zhi. Large area dispenser cathode applied to high current linac[J]. High Power Laser and Particle Beams, 2005, 17(07): 0- .
[16]	zhang yan, zhang rong zhu, dong jun, zhang jun, cai bang wei. Digital knifeedge testing technology on microoptical surface characterization[J]. High Power Laser and Particle Beams, 2004, 16(02): 0- .
[17]	wang zhan-shan, zhang zhong, wang feng-li, wu wen-juan, wang hong-chang, qin shu-ji, chen ling-yan. Fabrication of the multilayer beam splitters with large area for soft Xray laser interferometer[J]. High Power Laser and Particle Beams, 2004, 16(09): 0- .
[18]	zheng jian-gang, cai bang-wei, sui zhan, lu jing-ping, zheng kui-xing, zhang xiong-jun, dong yun, feng bin. Influence on discharge uniformity of electrodes configuration[J]. High Power Laser and Particle Beams, 2002, 14(02): 0- .