Influence of pressure on structure and properties of hollow glass microspheres

By using chemical vapor deposition-depolymerizable mandrel method, hollow glass microspheres for inertial confinement fusion targets were fabricated at different coating pressure. Surface roughness, sphericity, wall thickness uniformity and composition were measured by scanning electron microscope, atomic force microscope, VMR microscope and energy dispersive spectrometer, respectively. The results show that as the coating pressure increases, the surface roughness of the hollow glass microsphere and the carbon concentration decrease, while the wall thickness uniformity and the silicon concentration of the hollow glass microspheres increase.