Effect of inert gas on radicals during diamond film being deposited by HFCVD

Fan Yongzhi; Wang Chuanxin; Yi Cheng; Dai Kai; Ma Zhibin; Wang Shenggao; Wu Chao

doi:10.11884/HPLPB201527.122005

Volume 27 Issue 12

Jan. 2016

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Kan Mingxian, Duan Shuchao, Zhang Zhaohui, et al. Verification and validation of two dimensional magnetically driven simulation code MDSC2[J]. High Power Laser and Particle Beams, 2019, 31: 065001. doi: 10.11884/HPLPB201931.180300

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Fan Yongzhi, Wang Chuanxin, Yi Cheng, et al. Effect of inert gas on radicals during diamond film being deposited by HFCVD[J]. High Power Laser and Particle Beams, 2015, 27: 122005. doi: 10.11884/HPLPB201527.122005

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Effect of inert gas on radicals during diamond film being deposited by HFCVD

doi: 10.11884/HPLPB201527.122005

1.
Province Key Laboratory of Plasma Chemistry and Advanced Materials,School of Materials Science and Technology,Wuhan Institute of Technology,Wuhan 430073,China

Received Date: 2015-09-10
Rev Recd Date: 2015-10-08
Publish Date: 2015-11-26

Abstract

Abstract

The optical emission spectroscopy(OES) is an effective method for plasma diagnosing. In this article, OES was used to in situ measure the hot filament chemical vapor deposition(HFCVD) plasma of acetone/H2 system, acetone/H2/He system and acetone/H2/Ar system respectively. The intensity of radicals, the intensity ratios of CH, H to C2 and the value of electron temperature as a function of inert gas volume fraction were studied. The result shows that the spectrum intensities of radicals increase with the increasing of the inert gas volume fraction, and the influence of argon is much higher than that of helium. The intensity ratios of CH, H to C2 and the value of electron temperature decrease with the increasing concentration of the inert gas in the feed gas. The intensity ratio of CH/C2, H/C2 and the value of electron temperature are higher in the acetone/H2/He system than that in the acetone/H2/Ar system.
- hot filament chemical vapor deposition,
- inert gas,
- optical emission spectroscopy,
- diamond films

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