Modeling and experimental verification of microstructure of MEMS bionic vector hydrophone

The MEMS bionic vector hydrophone is a new type of underwater acoustic sensor, whose working performance is determined by the geometrical, material and environmental parameters of the internal MEMS acoustic-electric transduction microstructure. In order to have an insight of this kind of hydrophone and improve its working performance, the single degree of a freedom equivalent mechanical model of the microstructure is established through reasonable simplification. On this basis, the first order natural frequency of the micro structure of the hydrophone currently used is calculated, and an experimental platform is built to verify the calculated result. The results show that the error between the theoretical value and the experimental value is less than 5%, which verifies the validity of the mechanical model. This mechanical model provides a theoretical basis and reference for the design and optimization of the hydrophone and it is also a foundation for the performance analysis of sensors with similar structure.