Ma Wenying, Wei Yaohua, Wang Weimin, et al. Micro-opto-electro-mechanical systems mirror based on electrostatic repulsive circular rotation actuator[J]. High Power Laser and Particle Beams, 2016, 28: 064106. doi: 10.11884/HPLPB201628.064106
Citation:
Ma Wenying, Wei Yaohua, Wang Weimin, et al. Micro-opto-electro-mechanical systems mirror based on electrostatic repulsive circular rotation actuator[J]. High Power Laser and Particle Beams, 2016, 28: 064106. doi: 10.11884/HPLPB201628.064106
Ma Wenying, Wei Yaohua, Wang Weimin, et al. Micro-opto-electro-mechanical systems mirror based on electrostatic repulsive circular rotation actuator[J]. High Power Laser and Particle Beams, 2016, 28: 064106. doi: 10.11884/HPLPB201628.064106
Citation:
Ma Wenying, Wei Yaohua, Wang Weimin, et al. Micro-opto-electro-mechanical systems mirror based on electrostatic repulsive circular rotation actuator[J]. High Power Laser and Particle Beams, 2016, 28: 064106. doi: 10.11884/HPLPB201628.064106
Department of Communication Engineering,Chengdu University of Information Technology,Chengdu 610225,China;
2.
State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China
The micro-opto-electro-mechanical systems (MOEMS) mirror is an important optical device in laser display, light beam scanning, and adaptive optics applications. MOEMS mirrors are mostly attractive electrostatically actuated in the reported literatures, which are troubled by the pull-in effect. Additionally, the mismatch of square actuators and circular mirror will make the fill factor much lower. A MOEMS mirror based on electrostatic repulsive circular actuator and surface fabrication process is proposed in this paper. Arranged like a ring around, the actuator matches well with the circular mirror. The designed MOEMS mirror has an aperture of 204 m, and is fabricated by polycrystalline silicon multi-users-MEMS-processes (PolyMUMPs) process. Simulation and experimental results show that the mirror has a maximum rotation angle of 0.62, a response time of 494 s and an operation bandwidth of 1.191 kHz, and is suitable for the common beam scanning applications.
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