Effect of quality factor on frequency stability of filmbulk acoustic resonator oscillator

The loaded quality factor (QL) of the film bulk acoustic resonator(FBAR) oscillator and the quality factor (Q value) of FBAR are related to the frequency stability of FBAR oscillator. In order to study the effect of the two kinds of quality factors on the frequency stability, the multi physical field model of FBAR was established in the COMSOL multiphysics software. The parameters of the modified Butterworth-Van Dyke (MBVD) model were got by frequency domain simulation and model parameter fitting. A model of MBVD circuit was established in the ADS software, and Q value for different loss was obtained by the simulation of S parameters and computing the corresponding Q value with the Bode method. The Pierce-based oscillator was established and simulated with the harmonic balance, thus the phase noise was obtained by changing QL and Q, and the effect of the two factors on frequency stability was got. The results show that the frequency stability increased with the increase of QL and Q, Q decreased with the increase of different losses. If the Q is lower than 338, the effect of increasing QL to improve the frequency stability is poor. Using this kind of FBAR to construct oscillator will not meet the requirements of FBAR wireless communication RF front-end as the reference signal source and the readout circuit of FBAR sensor. This paper provides a reference for FBAR frequency reference design and FBAR sensor readout circuit.