Layout design method for BAW ladder filters

Zhang Dapeng; Gao Yang; Jia Le; Wen Shuwen

doi:10.11884/HPLPB201830.170112

Volume 30 Issue 1

Jan. 2018

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Article Navigation > High Power Laser and Particle Beams > 2018 > 30(1): 014101

Zhang Dapeng, Gao Yang, Jia Le, et al. Layout design method for BAW ladder filters[J]. High Power Laser and Particle Beams, 2018, 30: 014101. doi: 10.11884/HPLPB201830.170112

Citation:

Zhang Dapeng, Gao Yang, Jia Le, et al. Layout design method for BAW ladder filters[J]. High Power Laser and Particle Beams, 2018, 30: 014101. doi: 10.11884/HPLPB201830.170112

Zhang Dapeng, Gao Yang, Jia Le, et al. Layout design method for BAW ladder filters[J]. High Power Laser and Particle Beams, 2018, 30: 014101. doi: 10.11884/HPLPB201830.170112

Citation:

Zhang Dapeng, Gao Yang, Jia Le, et al. Layout design method for BAW ladder filters[J]. High Power Laser and Particle Beams, 2018, 30: 014101. doi: 10.11884/HPLPB201830.170112

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Layout design method for BAW ladder filters

doi: 10.11884/HPLPB201830.170112

Zhang Dapeng^1
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Gao Yang^{2, 3
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Jia Le¹,
Wen Shuwen^{1, 3}

1.
School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China
2.
Institute of Electronic Engineering, CAEP, Mianyang 621999, China
3.
State Key Laboratory of Particle Detection and Electronics, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China

Received Date: 2017-04-05
Rev Recd Date: 2017-08-20
Publish Date: 2018-01-15

Abstract

Abstract

In order to ensure the performance of the filter, reduce the volume of the filter and increase the number of chips on the wafer, a design method for the bulk acoustic wave (BAW) ladder filter is proposed. This method consists of 11 design rules and a design flow. The 11 design rules limit the shape and position of the BAW resonators (BAWRs), the distance between the BAWRs, the distance between the BAWRs and the pads and the interconnecting wire. There are 7 steps in the design flow: The first step is to preset the shape of each BAWR according to its active area value. The second step is to arrange BAWRs according to the BAW ladder filter circuit topology. The third step, "compression" layout. The fourth step, the BAWRs apodization, fine-tuning and rotation. The fifth step is to wire BAWRs and pads together. The sixth step is to detect if the layout of the filter meets the design rules. The seventh step, the use of a combined acoustic-electromagnetic BAW filter simulation method to verify the layout result. This paper presents the design rules and design flow of a 5-order BAW ladder filter with 10 series/parallel connected BAWRs. The optimized filter layout area utilization rate is 44%. Compared with the non-optimized filter layout, the optimized filter layout has lower insertion loss and higher out-of-band rejection. Thus we validate the feasibility of the layout design method.
- micro electro mechanical system,
- bulk acoustic wave,
- filter,
- resonator,
- layout

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References(10)

References

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