Stability of sol-gel silica coatings under ISO Class 5 atmosphere condition

Li Hao; Bai Yang; Yan Lianghong; Yan Hongwei; Li Heyang; Yang Ke; Liu Taixiang; Wang Tao; Yuan Xiaodong

doi:10.11884/HPLPB201830.170383

Volume 30 Issue 5

May 2018

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Xu Honglai, Xiang Rujian, Lu Fei, et al. Control method of local cementation stress in phase-corrector[J]. High Power Laser and Particle Beams, 2015, 27: 071002. doi: 10.11884/HPLPB201527.071002

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Li Hao, Bai Yang, Yan Lianghong, et al. Stability of sol-gel silica coatings under ISO Class 5 atmosphere condition[J]. High Power Laser and Particle Beams, 2018, 30: 052001. doi: 10.11884/HPLPB201830.170383

Xu Honglai, Xiang Rujian, Lu Fei, et al. Control method of local cementation stress in phase-corrector[J]. High Power Laser and Particle Beams, 2015, 27: 071002. doi: 10.11884/HPLPB201527.071002

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Stability of sol-gel silica coatings under ISO Class 5 atmosphere condition

doi: 10.11884/HPLPB201830.170383

Research Center of Laser Fusion, CAEP, Mianyang 621900, China

Received Date: 2017-09-25
Rev Recd Date: 2018-01-02
Publish Date: 2018-05-15

Abstract

Abstract

Sol-gel SiO₂ anti-reflective coatings were prepared with three different sol-gels, and their optic performance under atmosphere condition was studied in detail.Three AR coatings maintained reflective indexes of 1.15, 1.19, 1.25 respectively. The porous silica coatings can increase transmittance observably, but are very sensitive to contaminants and humidity in surroundings due to their strong adsorptive capacity resulting from the hydroxyl on the coatings surface and their porous structure with large specific surface area. The pores of silica coating can be filled with contaminants and humidity adsorbed on the coatings, which will increase the refractive index of the coatings and also absorb or scatter the light and therefore reduce the transmittance and increase the reflectance simultaneously. The fused silica coated with AR coatings were placed in ISO Class 5 cleanroom (ISO 14644-1) for 180 days. The results show that the optic performance change of all coatings is significant after 80 days. The AR coating with a refractive index of 1.19 is more stable comparatively.
- SiO₂ coating,
- atmosphere,
- ISO Class 5 cleanroom,
- transmittance,
- reflectance,
- refractive index

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References

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