Design of dispersive objective lens of large linear chromatic confocal 3D surface profiler

Yang Rui; Yun Yu; Xie Bin; Wang Ansu; Liu Ziwei; Liu Chenxing

doi:10.11884/HPLPB201830.170521

Volume 30 Issue 5

May 2018

Turn off MathJax

Article Contents

Article Navigation > High Power Laser and Particle Beams > 2018 > 30(5): 051002

Yang Rui, Yun Yu, Xie Bin, et al. Design of dispersive objective lens of large linear chromatic confocal 3D surface profiler[J]. High Power Laser and Particle Beams, 2018, 30: 051002. doi: 10.11884/HPLPB201830.170521

Citation:

Yang Rui, Yun Yu, Xie Bin, et al. Design of dispersive objective lens of large linear chromatic confocal 3D surface profiler[J]. High Power Laser and Particle Beams, 2018, 30: 051002. doi: 10.11884/HPLPB201830.170521

Citation:

PDF( 2645 KB)

Design of dispersive objective lens of large linear chromatic confocal 3D surface profiler

doi: 10.11884/HPLPB201830.170521

Yang Rui^1
,,
Yun Yu¹,
Xie Bin^{2
,
,},
Wang Ansu²,
Liu Ziwei²,
Liu Chenxing¹

1.
China Jiuyuan Hi-tech Equipment Corporation, Beijing 100094, China
2.
College of Physics, Optoelectronics and Energy, Soochow University, Suzhou 215006, China

Received Date: 2017-12-22
Rev Recd Date: 2018-02-11
Publish Date: 2018-05-15

Abstract

Abstract

Chromatic confocal 3D profiler has high precision, large measuring range and strong adaptability. The key component is the objective lens with axial dispersion. The nonlinear dispersion of axial dispersion and wavelength of the dispersion objective lens reduces the overall performance of theprofiler. In this paper, by analyzing the principle of confocal method to detect surface topography and the conditions for producing linear axial dispersion, the design indexes and requirements of confocal optical system are given, and a super-dispersive objective lens has been designed.The objective lens has four magnification structures in series dispersing the focus of wavelength between 400 and 700 nm to 30 mm longitudinal range. Through linear regression fitting of the defocusing amount and linearity of the wavelength, it is obtained that the coefficient of determination is 1, greatly improving the linearity of dispersion.
- chromatic confocal,
- dispersive objective lens,
- surface profile,
- linear dispersion,
- optical design

FullText(HTML)

References(10)

References

[1]	李海燕. 多功能共焦表面测量系统研究[D]. 哈尔滨: 哈尔滨工业大学, 2009. Li Haiyan. Study of the multi-functional confocal measurement system. Harbin: Harbin Institute of Technology, 2009
[2]	Minsky M. Microscopy apparatus[P]. US 3, 013, 467, 1961-12.
[3]	Courtney-Pratt J S. The use of our specially designed monochromatic microscope objective to examine tracks in nuclear emulsions[J]. Opt Eng, 1976(15): 379-383.
[4]	Molesini G, Pedrini G, Poggi P, et al. Focus-wavelength encoded optical profilometer[J]. Optics Communication, 1984, 49(4): 229-223.
[5]	朱万彬, 钟俊, 莫仁芸, 等. 光谱共焦位移传感器物镜设计[J]. 光电工程, 2010, 37(8): 62-66. https://www.cnki.com.cn/Article/CJFDTOTAL-GDGC201008015.htm Zhu Wanbin, Zhong Jun, Mo Renyun, et al. Design of spectral confocal chromatic displacement sensor objective. Opto-Electronic Engineering, 2010, 37(8): 62-66 https://www.cnki.com.cn/Article/CJFDTOTAL-GDGC201008015.htm
[6]	王津楠, 陈凤东, 刘炳国, 等. 基于白光LED的光谱共焦位移传感器[J]. 中国测试, 2017, 43(1): 69-73. https://www.cnki.com.cn/Article/CJFDTOTAL-SYCS201701015.htm Wang Jinnan, Chen Fengdong, Liu Bingguo, et al. White LED-based spectrum confocal displacement sensor. China Measurement & Test, 2017, 43(1): 69-73 https://www.cnki.com.cn/Article/CJFDTOTAL-SYCS201701015.htm
[7]	刘乾, 王洋, 杨维川, 等. 线性色散设计的光谱共焦测量技术[J]. 强激光与粒子束, 2014, 26: 051010. doi: 10.11884/HPLPB201426.051010 Liu Qian, Wang Yang, Yang Weichuan, et al. Chromatic confocal microscope with linear dispersive objective. High Power Laser and Particle Beams, 2014, 26: 051010 doi: 10.11884/HPLPB201426.051010
[8]	乔杨, 张宁, 徐熙平, 等. 基于共焦法的透镜厚度测量系统设计[J]. 仪器仪表学报, 2011, 32(7): 1635-1641. https://www.cnki.com.cn/Article/CJFDTOTAL-YQXB201107029.htm Qiao Yang, Zhang Ning, Xu Xiping, et al. Design of lens thickness measurement system based on confocal technology. Chinese Journal of Scientific Instrument, 2011, 32(7): 1635-1641 https://www.cnki.com.cn/Article/CJFDTOTAL-YQXB201107029.htm
[9]	刘乾, 杨维川, 袁道成, 等. 光谱共焦显微镜的线性色散物镜设计[J]. 光学精密工程, 2013, 21(10): 2473-2479. https://www.cnki.com.cn/Article/CJFDTOTAL-GXJM201310001.htm Liu Qian, Yang Weichuan, Yuan Daocheng, et al. Design of linear dispersive objective for chromatic confocal microscope. Optics and Precision Engineering, 2013, 21(10): 2473-2479 https://www.cnki.com.cn/Article/CJFDTOTAL-GXJM201310001.htm
[10]	Novak J, Miks A. Hyperchromats with linear dependence of longitudinal chromatic aberration on wavelength[J]. Optik—International Journal for Light and Electron Optics, 2005, 116(4): 165-168.