Citation: | Liu Wenjun, Yang Wei, Guo Yinbiao. Characteristic of bounded abrasive polishing for fused silica glass in anhydrous environment[J]. High Power Laser and Particle Beams, 2018, 30: 082001. doi: 10.11884/HPLPB201830.180028 |
[1] |
Hawleyfedder R A, Stolz C J, Menapace J A, et al. NIF optical materials and fabrication technologies: an overview[C]//Proc of SPIE. 2004, 5341: 102-105.
|
[2] |
郑万国, 魏晓峰, 朱启华, 等. 神光-Ⅲ主机装置成功实现60 TW/180 kJ三倍频激光输出[J]. 强激光与粒子束, 2016, 28: 019001. doi: 10.11884/HPLPB201628.019901
Zheng Wanguo, Wei Xiaofeng, Zhu Qihua, et al. SG-Ⅲ laser facility has successfully achieved 60 TW/180 kJ ultraviolet laser (351 nm) output. High Power Laser and Particle Beams, 2016, 28: 019001 doi: 10.11884/HPLPB201628.019901
|
[3] |
Moses E I, Campbell J N, Stolz C J, et al. The National Ignition Facility: The world's largest optics and laser system[C]//Proc of SPIE. 2003, 5001: 1-15.
|
[4] |
叶卉, 杨炜, 胡陈林, 等. 磨削加工光学元件亚表面损伤探究[J]. 强激光与粒子束, 2014, 26 : 092010. doi: 10.11884/HPLPB201426.092010
Ye Hui, Yang Wei, Hu Chenlin, et al. Subsurface damage of ground optical elements. High Power Laser and Particle Beams, 2014, 26 : 092010 doi: 10.11884/HPLPB201426.092010
|
[5] |
林晓辉, 马凯威, 黄海滨, 等. 轴对称非球面磨削表面粗糙度和波纹度的分布特性[J]. 强激光与粒子束, 2015, 27: 092013. doi: 10.11884/HPLPB201527.092013
Lin Xiaohui, Ma Kaiwei, Huang Haibin, et al. Distribution characteristics of surface roughness and waviness error in axisymmetric aspheric grinding. High Power Laser and Particle Beams, 2015, 27: 092013 doi: 10.11884/HPLPB201527.092013
|
[6] |
杨炜, 郭隐彪, 许乔, 等. 超精抛光中边缘效应对材料去除量的影响[J]. 强激光与粒子束, 2008, 20(10): 1653-1657. http://www.hplpb.com.cn/article/id/3727
Yang Wei, Guo Yinbiao, Xu Qiao, et al. Edge effects on material removal amount in ultra-precise polishing process. High Power Laser and Particle Beams, 2008, 20(10): 1653-1657 http://www.hplpb.com.cn/article/id/3727
|
[7] |
Li Yaguo, Hou Jing, Xu Qiao, et al. The characteristics of optics polished with a polyurethane pad[J]. Optics Express, 2008, 16(14): 10285-10293. doi: 10.1364/OE.16.010285
|
[8] |
Gillman B E, Jacobs S D. Bound-abrasive polishers for optical glass. [J]. Applied Optics, 1998, 37(16): 3498. doi: 10.1364/AO.37.003498
|
[9] |
Zhou L, Eda H, Shimizu J, et al. Defect-free fabrication for single crystal silicon substrate by chemo-mechanical grinding[J]. CIRP Annals-Manufacturing Technology, 2006, 55(1): 313-316. doi: 10.1016/S0007-8506(07)60424-7
|
[10] |
Li Yaguo, Wu Yongbo, Zhou Libo, et al. Vibration-assisted dry polishing of fused silica using a fixed-abrasive polisher[J]. International Journal of Machine Tools & Manufacture, 2014, 77(1): 93-102.
|
[11] |
Tian Y B, Zhou L, Shimizu J, et al. Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process[J]. Applied Surface Science, 2009, 255(7): 4205-4211. doi: 10.1016/j.apsusc.2008.11.009
|
[12] |
Cook L M. Chemical processes in glass polishing[J]. Journal of Non Crystalline Solids, 1990, 120(1): 152-171.
|
[13] |
Osseo-Asare K. Surface chemical processes in chemical mechanical polishing relationship between silica material removal rate and the point of zero charge of the abrasive material[J]. Journal of the Electrochemical Society, 2002, 149(12): G651-G655. doi: 10.1149/1.1516777
|
[14] |
Preston F W. The structure of abraded glass surfaces[J]. Transactions of the Optical Society, 1922, 23(3): 141. doi: 10.1088/1475-4878/23/3/301
|
[15] |
Block H. Seizure delay method for determining the protection against scuffing afforded by extreme lubricants[J]. Society of Auto Engrs, 1939, 44(5): 193-210.
|