Impact of annealing on laser resistance of  HfO<sub>2</sub> films fabricated byALD, IBS and EBE techniques

Liu Hao; Ma Ping; Pu Yunti; Zhao Zuzhen

doi:10.11884/HPLPB202032.200006

Volume 32 Issue 7

Jun. 2020

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Article Navigation > High Power Laser and Particle Beams > 2020 > 32(7): 071002

Liu Hao, Ma Ping, Pu Yunti, et al. Impact of annealing on laser resistance of HfO2 films fabricated byALD, IBS and EBE techniques[J]. High Power Laser and Particle Beams, 2020, 32: 071002. doi: 10.11884/HPLPB202032.200006

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Liu Hao, Ma Ping, Pu Yunti, et al. Impact of annealing on laser resistance of HfO₂ films fabricated byALD, IBS and EBE techniques[J]. High Power Laser and Particle Beams, 2020, 32: 071002. doi: 10.11884/HPLPB202032.200006

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Impact of annealing on laser resistance of HfO₂ films fabricated byALD, IBS and EBE techniques

doi: 10.11884/HPLPB202032.200006

1.
Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China
2.
Research Center of Laser Fusion, CAEP, P. O. Box 919-988, Mianyang 621900, China

Received Date: 2020-01-08
Rev Recd Date: 2020-03-27
Publish Date: 2020-06-24

Abstract

Abstract

Annealing is one of the most accessible post-treatment techniques in high power laser coatings, however, the impact of annealing on laser resistance of the coatings is not clear until today. In this experiment, HfO₂ films have been prepared by EBE, IBS and ALD techniques, respectively. The laser resistance of each film before and after annealing has been tested with the 1 064 nm Nd: YAG laser according to ISO 21254. It is found that the ALD HfO₂ film has the highest LIDT, while the IBS HfO₂ film has the lowest. It is also found that the laser resistance of all the samples does not benefit from the 300 ℃ annealing, moreover, the laser resistance of the ALD HfO₂ film decreases tremendously after annealing at 500 ℃. The experimental results are discussed and analyzed.
- HfO₂ film,
- laser induced damage threshold,
- electron beam evaporation,
- ion beam sputtering,
- atomic layer deposition

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References(23)

References

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