SiO₂/HfO₂高反射膜的研制

doi: 10.3788/HPLPB20122406.1276

• Cheng Xinbin^1,2 , 
• Shen Zhengxiang^1,2 , 
• Jiao Hongfei^1,2 , 
• Ma Bin^1,2 , 
• Zhang Jinlong^1,2 , 
• Ding Tao^1,2 , 
• Wang Zhanshan^{1,2 ,  ,} 

• 1.

  Key Laboratory of Advanced Micro-structure Materials,Department of Physics,Tongji University,Shanghai 200092,China;

• 2.

  Institute of Precision Optical Engineering,Tongji University,Shanghai 200092,China