平面调制靶的正弦波曲面超精密加工与表征

Huang YanHua; Gao DangzHong; Xie Jun; Tong WeicHao; Yuan GuangHui; Ma Xiaojun

doi:10.3788/HPLPB20122406.1429

Volume 24 Issue 06

May 2012

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Article Navigation > High Power Laser and Particle Beams > 2012 > 24(06): 1429-1433

Huang YanHua, Gao DangzHong, Xie Jun, et al. 平面调制靶的正弦波曲面超精密加工与表征[J]. High Power Laser and Particle Beams, 2012, 24: 1429-1433. doi: 10.3788/HPLPB20122406.1429

Citation:

Huang YanHua, Gao DangzHong, Xie Jun, et al. 平面调制靶的正弦波曲面超精密加工与表征[J]. High Power Laser and Particle Beams, 2012, 24: 1429-1433. doi: 10.3788/HPLPB20122406.1429

Huang YanHua, Gao DangzHong, Xie Jun, et al. 平面调制靶的正弦波曲面超精密加工与表征[J]. High Power Laser and Particle Beams, 2012, 24: 1429-1433. doi: 10.3788/HPLPB20122406.1429

Citation:

Huang YanHua, Gao DangzHong, Xie Jun, et al. 平面调制靶的正弦波曲面超精密加工与表征[J]. High Power Laser and Particle Beams, 2012, 24: 1429-1433. doi: 10.3788/HPLPB20122406.1429

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平面调制靶的正弦波曲面超精密加工与表征

doi: 10.3788/HPLPB20122406.1429

1.
Research Center of Laser Fusion,CAEP,P.O.Box 919-987,Mianyang 621900,China

Received Date: 2011-11-24
Rev Recd Date: 2012-02-20
Publish Date: 2012-06-15

Abstract

Abstract

采用超精密车削技术加工微尺度正弦波调制曲面微结构，解决了尖刃金刚石刀具刃磨和刀具对中等关键技术，研究了进给量、背吃刀量和主轴转速等主要切削参数对铜模板表面粗糙度的影响规律。加工出波长为（20～150）m0.5 m﹑峰谷高度差为（0.2～20）m0.1 m的带正弦波调制曲面。采用原子力显微镜对模板表面轮廓扫描，在20 m20 m的范围内，其表面粗糙度均方根值小于10 nm。将正弦波调制曲面测量结果与理论轮廓进行比较，采用最小二乘寻优算法评定轮廓误差。完成了曲面轮廓的功率谱表征，利用加工的曲面微结构制备了平面调制靶，实现正弦波调制曲面轮廓的精确转移。
- rayleigh-taylor instability,
- surface perturbation target,
- ultra-precision turning,
- power spectrum