Surface measurement and evaluation of large-aperture continuous phase plates

Wen Shenglin; Shi Qikai; Yan Hao; Zhang Yuanhang; Yang Chunlin; Wang Jian

doi:10.3788/HPLPB20122410.2296

Volume 24 Issue 10

Sep. 2012

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Article Navigation > High Power Laser and Particle Beams > 2012 > 24(10): 2296-2300

Rao Huanle, Liu Zhengkun, Liu Ying, et al. Cerium oxide polishing to improve uniformity of diffraction efficiencyof beam sampling grating[J]. High Power Laser and Particle Beams, 2013, 25: 1609-1610. doi: 10.3788/HPLPB20132507.1609

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Wen Shenglin, Shi Qikai, Yan Hao, et al. Surface measurement and evaluation of large-aperture continuous phase plates[J]. High Power Laser and Particle Beams, 2012, 24: 2296-2300. doi: 10.3788/HPLPB20122410.2296

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Surface measurement and evaluation of large-aperture continuous phase plates

doi: 10.3788/HPLPB20122410.2296

1.
Chengdu Fine Optical Engineering Research Center,Chengdu 610041,China

Received Date: 2011-11-23
Rev Recd Date: 2012-06-05
Publish Date: 2012-10-15

Abstract

Abstract

Based on the stitching method using global least squares and the image fusion method, the sub-aperture stitching interferometry method for continuous phase plates(CPPs) is established. The residual surface error calculated by correlative matching is used to evaluate the CPPs fabrication quality. Moreover, the measurement system is built using high precision dynamic interferometer. The numerical simulation and measurement are carried into execution for a CPP with 430 mm430 mm aperture. The results show that the root mean square(RMS) of residual surface error obtained by numerical simulation is only 0.005 nm and the experimental RMS of residual surface error is less than 5 nm. So these parameters can meet the demands of surface measurement and evaluation of large-aperture continuous phase plates, and the correctness and feasibility of this method are verified.
- optical design and fabrication,
- continuous phase plate,
- sub-aperture stitching interferometry,
- residual surface error,
- inertial confinement fusion

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