Diffraction efficiency of high line-density X-ray transmission gratings

Zhang Wenhai; Cao Leifeng; Zhu Xiaoli; Xie Changqing; Liu Shenye

doi:10.3788/HPLPB20122410.2347

Volume 24 Issue 10

Sep. 2012

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Article Navigation > High Power Laser and Particle Beams > 2012 > 24(10): 2347-2350

Zhang Wenhai, Cao Leifeng, Zhu Xiaoli, et al. Diffraction efficiency of high line-density X-ray transmission gratings[J]. High Power Laser and Particle Beams, 2012, 24: 2347-2350. doi: 10.3788/HPLPB20122410.2347

Citation:

Zhang Wenhai, Cao Leifeng, Zhu Xiaoli, et al. Diffraction efficiency of high line-density X-ray transmission gratings[J]. High Power Laser and Particle Beams, 2012, 24: 2347-2350. doi: 10.3788/HPLPB20122410.2347

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Diffraction efficiency of high line-density X-ray transmission gratings

doi: 10.3788/HPLPB20122410.2347

1.
Research Center of Laser Fusion,CAEP,P.O.Box 919-986,Mianyang 621900,China;
2.
Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

Received Date: 2011-10-06
Rev Recd Date: 2012-04-11
Publish Date: 2012-10-15

Abstract

Abstract

X-ray transmission gratings with high line-density are key components of various high-resolution spectrometers. X-rays transmission gratings with 5000 l/mm are needed to diffract X-ray at 2.0-5.0 keV. To obtain the absolute efficiency of the 5000 l/mm gratings made domestically, the intensity ratio of diffraction peaks was experimentally measured for different energy X-rays radiated from the synchrotron radiation source. The duty cycle fitted by measured data was consistent with that obtained by the electron scanning microscope. Finally, the absolute diffraction efficiency was calculated via the rectangle cross-section model.
- transmission gratings,
- diffraction efficiency,
- experimental calibration,
- high line-density

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