Monte Carlo simulation of inter-element effect in energy dispersive X-ray fluorescence

In energy dispersive X-ray fluorescence (EDXRF) techniques, the inter-element effect can influence the analysis accuracy seriously. The Monte Carlo simulation method was adopted to simulate the Si(PIN) detector based EDXRF system, and a new Gaussian broadening algorithm was established for the flux spectrum. As compared with the experiment energy spectra of Fe and Ni, the flux spectrum after broadening fits the K characteristic X-ray spectrum much better. The relationship curve between normalized count and content of each element is obtained. Results show that this method can correct inter-element effect automatically and provide theoretical intensity of the K line characteristic X-ray spectrum.