Error analysis of deformation measurement of active lap

Zhao Hongshen; Li Xiaojin; Zeng Zhige

doi:10.3788/HPLPB20132502.0325

Volume 25 Issue 02

Dec. 2012

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Article Navigation > High Power Laser and Particle Beams > 2013 > 25(02): 325-329

Zhao Hongshen, Li Xiaojin, et al. Error analysis of deformation measurement of active lap[J]. High Power Laser and Particle Beams, 2013, 25: 325-329. doi: 10.3788/HPLPB20132502.0325

Citation:

Zhao Hongshen, Li Xiaojin, et al. Error analysis of deformation measurement of active lap[J]. High Power Laser and Particle Beams, 2013, 25: 325-329. doi: 10.3788/HPLPB20132502.0325

Zhao Hongshen, Li Xiaojin, et al. Error analysis of deformation measurement of active lap[J]. High Power Laser and Particle Beams, 2013, 25: 325-329. doi: 10.3788/HPLPB20132502.0325

Citation:

Zhao Hongshen, Li Xiaojin, et al. Error analysis of deformation measurement of active lap[J]. High Power Laser and Particle Beams, 2013, 25: 325-329. doi: 10.3788/HPLPB20132502.0325

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Error analysis of deformation measurement of active lap

doi: 10.3788/HPLPB20132502.0325

1.
Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;
2.
Graduate University of Chinese Academy of Sciences,Beijing 100049,China

Received Date: 2012-06-21
Rev Recd Date: 2012-09-26
Publish Date: 2013-02-10

Abstract

Abstract

In the progress of large aspheric mirror manufacturing, computer controlled active lap(CCAL) has been proved to be a useful tool with high precision and efficiency. Before polishing, the deformation measurement of the lap is necessary. The measurement system has 60 high precision displacement sensors. Error analysis and essential data processing of the measurement system are putting forward. The main error contains ball-probe error as the system error, angle error of fitting sensors and error of coordinate offset as the stochastic error. In the mathematic model established based on the characteristic of paraboloid and coordinate transform, the influence of the three kinds of errors is calculated. After some interrelated compensation and data processing, the result gotten shows that the measurement precision improves.
- active lap,
- deformation measurement,
- error analysis,
- tilt removing,
- error compensation

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