Physical model of neutron depth profiling in common conditions

In neutron depth profiling(NDP), the recorded ions have a spread of energies because of energy straggling, geometrical acceptance angles and detector energy resolution effects. In common conditions, a physical model predicting the observed energy spectrum of a sample with target nuclide in prearranged depth changes is built on the basis of Gaussian function. The predicted ion spectrum derived from the above model is well accorded with the observed energy spectrum in peak position and FWHM. So the model can be applied to deconvolution of NDP spectra.