Images prgressing technology of optics damage online inspection

Images progressing technology of optics damage pictures which were taken in total internal reflection edge illumination was studied in this paper. Signal intensity of defects is stronger than backgrounds intensity in the edge lit images. Based on this property, local signal intensity ratio image was produced by Gaussian filter to locate the defects with high accuracy. A calibration equation between the size of the defects and the gray value was built. The size of the defects could be precisely calculated using the calibration equation. A comparison test was carried out, the results indicate that the proposed algorithm is superior to the traditional ones on the precision.