Calculation of equivalence of proton and neutron displacement damage in silicon

Based on the Monte Carlo software Geant4, we investigate the Coulomb scattering of protons by silicon and nuclear reactions induced by protons and neutrons in silicon, and the generation of recoil atoms depositing non-ionizing energy. The methodfor calculating non-ionizing energy stopping power of the protons and neutrons in silicon is established. This method describes the Coulomb scattering among atoms, and the screened Coulomb scattering between charged particles and lattice atoms. The non-ionizing energy stopping power of different energy neutrons and protons in silicon due to nuclear reaction and direct Coulomb scattering and its equivalence are calculated. The calculation results agree with the neutron ASTM standard and the proton data calculated by the reference.