Investigation on curing process of vapor-deposited polyimide thin films

Cao Hong; Huang Yong; Ye Lina; Wei Jianjun; Zhang Zhanwen

doi:10.3788/HPLPB20132508.1995

Volume 25 Issue 08

Nov. 2013

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Article Navigation > High Power Laser and Particle Beams > 2013 > 25(08): 1995-1999

Cui Chaolong, Huang Honghua, Mei Haiping, et al. Turbulent scintillation lidar for acquiring atmospheric turbulence information[J]. High Power Laser and Particle Beams, 2013, 25: 1091-1096. doi: 10.3788/HPLPB20132505.1091

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Cao Hong, Huang Yong, Ye Lina, et al. Investigation on curing process of vapor-deposited polyimide thin films[J]. High Power Laser and Particle Beams, 2013, 25: 1995-1999. doi: 10.3788/HPLPB20132508.1995

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Investigation on curing process of vapor-deposited polyimide thin films

doi: 10.3788/HPLPB20132508.1995

1.
Institute of Atomic and Molecular Physics,Sichuan University,Chengdu 610065,China;
2.
Research Center of Laser Fusion,CAEP,Mianyang 621900,China

Received Date: 2012-12-16
Rev Recd Date: 2013-04-03
Publish Date: 2013-06-19

Abstract

Abstract

Using vapor deposition polymerizatioin method, polyimide(PI) thin films were successfully fabricated in different curing conditions. Poly (amic acid) (PAA) thin films at different temperatures and for different retention times at 300 ℃ were analysed by FTIR. The thin films held at 300 ℃ for 3 h were taken off from KBr substrate, and photograghed in interferometry microscope. Also, the thin films were analysed by thermogravimetry (TG) at different heating rates. The results show that the extent of imidization increases with temperature increasing in curing process and retention time increasing at 300 ℃. The thin films can be taken off from KBr for the retention time of 3 h. After curing process surface, the roughness of thin film is good, but Rq is 9.8 nm. The heating rate has a little influence on the ultimate extent of imidization, and low heating rates, 10 ℃/min or even lower, are preferred.
- polyimide,
- thin film,
- curing,
- vapor deposition

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