Thermal-structural-optical integrated analysis method of laser optical system

This article expatiated the theory of the thermal-structural-optical (TSO) integrated analysis and interface polynomial. The integrated analysis method was applied to the laser optical system. First of all, the thermal analysis and structure analysis of the optical system were analyzed by FEA software. Then the analyzed data were picked up and made Zernike surface fitting by software. Finally, the influence of the thermal deformation on the beam quality was analyzed by optical software. The results show that the integrated analysis can analyze the influence of optical mirror thermal deformation, and can guide optical system design in the laser optical system.