Emission spectrum diagnostics for nitrogen plasmas generated by pulsed microwave discharge

Emission spectrum measurement and simulation are conducted to derive the vibration, rotation and electronic excitation temperature of nitrogen plasmas generated in microwave discharge with different pulse width and pressure. At the pressure of 266~400 Pa, the vibration temperature of plasmas is (2700100) K, electronic excitation temperature is (0.320.015) eV. Rotation temperature rises with the rising of pulse width, the maximum rotation temperature measured in this experiment is 370 K. Vibration temperature and electronic excitation temperature trend to decrease at the same time at the pressure away from 266～400 Pa, but rotation temperature trends to increase. This means electronic excitation temperature and vibration temperature have a strong relationship.