Accuracy transfer method of large aperture standard mirrors’ absolute surface error

Xu Kaiyuan; Li Qiang; Liu Ang; Gao Bo; He Yuhang

doi:3210

Volume 25 Issue 12

Dec. 2013

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Article Navigation > High Power Laser and Particle Beams > 2013 > 25(12): 3210-3214

Deng Wenhui, Tang Caixue, Chen Xianhua, et al. Path segment division and feed-rate solution in ion beam figuring[J]. High Power Laser and Particle Beams, 2013, 25: 3292-3296. doi: 3292

Citation:

Xu Kaiyuan, Li Qiang, Liu Ang, et al. Accuracy transfer method of large aperture standard mirrors’ absolute surface error[J]. High Power Laser and Particle Beams, 2013, 25: 3210-3214. doi: 3210

Deng Wenhui, Tang Caixue, Chen Xianhua, et al. Path segment division and feed-rate solution in ion beam figuring[J]. High Power Laser and Particle Beams, 2013, 25: 3292-3296. doi: 3292

Citation:

Xu Kaiyuan, Li Qiang, Liu Ang, et al. Accuracy transfer method of large aperture standard mirrors’ absolute surface error[J]. High Power Laser and Particle Beams, 2013, 25: 3210-3214. doi: 3210

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Accuracy transfer method of large aperture standard mirrors’ absolute surface error

doi: 3210

1.
Chengdu Fine Optical Engineering Research Center,Chengdu 610041,China

Received Date: 2013-09-11
Rev Recd Date: 2013-09-23
Publish Date: 2013-12-15

Abstract

Abstract

An accuracy transfer method of the standard flats absolute surface error is proposed. When we acquire the absolute surface error of a standard flat, we can use this method to transfer its accuracy to another standard flat. According to the experimental results, we conclude that Zernike polynomials power term can fit the changing amount very well. In order to deal with the surface difference at different temperatures, we propose a method using the lines absolute surface data extracted by classical three-flat test to estimate the power amount. A well manufacturing optical part is tested by two interferometers. The use of this method can lessen the difference between the results of two-dimensional distribution.
- wavefront testing,
- surface-accuracy transfer method,
- high-precision surface testing,
- interferometry,
- optical instruments

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