Laser conditioning effect on HfO<sub>2</sub>/SiO<sub>2</sub> film

Wei Yaowei; Zhang Zhe; Liu Hao; Ouyang Sheng; Zheng Yi; Tang Gengyu; Chen Songlin; Ma Ping

doi:3338

Volume 25 Issue 12

Dec. 2013

Turn off MathJax

Article Contents

Abstract

References

Article Navigation > High Power Laser and Particle Beams > 2013 > 25(12): 3338-3342

Wei Yaowei, Zhang Zhe, Liu Hao, et al. Laser conditioning effect on HfO2/SiO2 film[J]. High Power Laser and Particle Beams, 2013, 25: 3338-3342. doi: 3338

Citation:

Wei Yaowei, Zhang Zhe, Liu Hao, et al. Laser conditioning effect on HfO₂/SiO₂ film[J]. High Power Laser and Particle Beams, 2013, 25: 3338-3342. doi: 3338

Wei Yaowei, Zhang Zhe, Liu Hao, et al. Laser conditioning effect on HfO2/SiO2 film[J]. High Power Laser and Particle Beams, 2013, 25: 3338-3342. doi: 3338

Citation:

Wei Yaowei, Zhang Zhe, Liu Hao, et al. Laser conditioning effect on HfO₂/SiO₂ film[J]. High Power Laser and Particle Beams, 2013, 25: 3338-3342. doi: 3338

PDF( 2918 KB)

Laser conditioning effect on HfO₂/SiO₂ film

doi: 3338

1.
Chengdu Fine Optical Engineering Research Center,Chengdu 610041,China

Received Date: 2013-07-22
Rev Recd Date: 2013-08-14
Publish Date: 2013-12-15

Abstract

Abstract

Laser conditioning is one of the important methods to improve the laser damage threshold of film optics. Firstly, a large aperture laser was used to irradiate the HfO2/SiO2 reflectors, which were evaporated from hafnia and silica by e-beam. Secondly, a laser calorimeter was used to test the film absorption before and after laser irradiation. Focused ion beam (FIB) was few reported using on laser film, it was used to study the damage morphology and explore the cause of damage. The shooting of the partial ejection on nodule was obtained for the first time, which provided the basis for study the damage process. The results show that film absorption was decreased obviously after the laser irradiation, laser conditioning can raise the laser damage threshold by the cleaning mechanism. For the HfO2/SiO2 reflectors, laser conditioning was effective to eject the nodules on substrate. It resulted from the nodule residue not to affect the subsequent laser. In addition, laser conditioning was not effective to the nodule in the film, which might be from the material spatter in coating process. In this case, other method could be used to get rid of the nodules.
- thin film,
- laser conditioning,
- anti-reflection coating,
- laser damage threshold,
- nodule

FullText(HTML)

References(0)

References

Relative Articles

[1]	Zhang Jingjing, Yang Feng, Kou Yang, Wang Zhuohan, Yuan Lei, Gao Hongwei, Bo Yong, Peng Qinjun. Research progress and application of laser preconditioning technology for optical components[J]. High Power Laser and Particle Beams, 2023, 35(8): 081001. doi: 10.11884/HPLPB202335.230067
[2]	Liu Jie, Zhang Weili, Zhu Meiping. Laser conditioning effect of HfO₂/SiO₂ high reflectors at 532 nm[J]. High Power Laser and Particle Beams, 2015, 27(03): 032034. doi: 10.11884/HPLPB201527.032034
[3]	Zheng Yi, Liu Zhichao, Ma Ping, Chen Songlin, Zhang Qinghua. Laser conditioning technique of mid-size laser spot[J]. High Power Laser and Particle Beams, 2013, 25(12): 3180-3184. doi: 3180
[4]	Dai Fu, Yang Liming. Laser conditioning methods for hafnia silica multilayer high-reflective coatings[J]. High Power Laser and Particle Beams, 2013, 25(04): 929-934.
[5]	zhang chunlai, li xibin, yuan xiaodong, wang zhiguo, zu xiaotao, . Influence of impurities on laser-induced damage of sol-gel SiO2 films[J]. High Power Laser and Particle Beams, 2011, 23(05): 0- .
[6]	gao pengpeng, jin yunxia, liu shijie, wang jianpeng, chen shunli. Laser-conditioning on multilayer dielectric gratings[J]. High Power Laser and Particle Beams, 2011, 23(10): 0- .
[7]	zhou gang, ma bin, jiao hongfei, ding tao, zhang jinlong, shen zhengxiang, cheng xinbin, wang zhanshan. Laser damage threshold measurements of 1 064 nm high-reflection mirrors[J]. High Power Laser and Particle Beams, 2011, 23(04): 0- .
[8]	chen meng, xiang xia, jiang yong, zu xiaotao, yuan xiaodong, zheng wanguo, wang haijun, li xibin, jiang xiaodong, wang chengcheng, . Enhancement of laser induced damage threshold of fused silica by acid etching combined with UV laser conditioning[J]. High Power Laser and Particle Beams, 2010, 22(06): 0- .
[9]	li shuhong, he hongbo, liu xiaofeng, shan yongguang, zhou ming, li dawei, zhao yuanan, fan zhengxiu. Absorption and laser-induced damage threshold of single-layer HfO₂ film[J]. High Power Laser and Particle Beams, 2010, 22(11): 0- .
[10]	yang yu-jie, zhang lei, xu yao, wu dong, sun yu-han, zhao song-nan, wang hai-jun, jiang xiao-dong, . Anti-reflective mesoporous SiO2 films with high laser-induced damage threshold[J]. High Power Laser and Particle Beams, 2008, 20(06): 0- .
[11]	huang jin, zhao song-nan, lu hai-bing, jiang xiao-dong, yuan xiao-dong, zheng wan-guo. Damage-threshold increase of pickoff optics using 1 064 nm wavelength laser[J]. High Power Laser and Particle Beams, 2007, 19(05): 0- .
[12]	shen jun, luo ai-yun, wu guang-ming, lin xue-jing, xie zhi-yong, wu xiao-xian, liu chun-ze. Laser-induced damage threshold of hafnia thin films with chemical method[J]. High Power Laser and Particle Beams, 2007, 19(03): 0- .
[13]	xia zhi-lin, shao jian-da, fan zheng-xiu, wu shi-gang. Formation mechanism of bubbles in the surface of films induced by long pulse width laser[J]. High Power Laser and Particle Beams, 2006, 18(04): 0- .
[14]	cui yun, zhao yuan-an, he hong-bo, fan zheng-xiu, shao jian-da. Effects of ultrasonics cleaning and laser conditioning on the laser induced damage threshold of the antireflection[J]. High Power Laser and Particle Beams, 2006, 18(10): 0- .
[15]	tian guang-lei, huang jian-bing, he hong-bo, shao jian-da. Effect of annealing on microstructure and laser-induced damage threshold of ZrO2 Coatings[J]. High Power Laser and Particle Beams, 2005, 17(02): 217- .
[16]	zhang dong-ping, zhao yuan-an, fan shu-hai, gao wei-dong, shao jian-da, fan zheng-xiu. Influences of oxygen partial pressure on the laser induced damage threshold of ZrO2 film[J]. High Power Laser and Particle Beams, 2005, 17(01): 0- .
[17]	zhang dong-ping, zhang da-wei, fan shu-hai, huang jian-bing, zhao yuan-an, shao jian-da, fan zheng-xiu. Using ion post-treatment technique to improve laser-induced damage threshold of thin films[J]. High Power Laser and Particle Beams, 2005, 17(02): 213- .
[18]	huang zu-xin, jiang xiao-dong, ren huan, zhong wei, ye lin, li ke, l hai-bing. Study of laser conditioning influence on properties of optical films[J]. High Power Laser and Particle Beams, 2004, 16(01): 0- .
[19]	jiang xiao-dong, huang zu-xing, ren huan, peng jing, ye lin, tang can. Study of laser conditioning process for optical films[J]. High Power Laser and Particle Beams, 2002, 14(03): 0- .
[20]	gao hongyi, lou qihong, dong jingxing, ding aizhen. MONITORING AND MEASUREMENT OF DAMAGE HRESHOLD ON HR AND AR COATINGS FOR THE 308 nm EXCIMER LASER[J]. High Power Laser and Particle Beams, 1998, 10(01): 0- .