wang feng, li jun, li guo-jun, et al. Research on structure and micro-distortion of nano Fe/Al films fabricated by pulse laser deposition[J]. High Power Laser and Particle Beams, 2005, 17.
Citation:
wang feng, li jun, li guo-jun, et al. Research on structure and micro-distortion of nano Fe/Al films fabricated by pulse laser deposition[J]. High Power Laser and Particle Beams, 2005, 17.
wang feng, li jun, li guo-jun, et al. Research on structure and micro-distortion of nano Fe/Al films fabricated by pulse laser deposition[J]. High Power Laser and Particle Beams, 2005, 17.
Citation:
wang feng, li jun, li guo-jun, et al. Research on structure and micro-distortion of nano Fe/Al films fabricated by pulse laser deposition[J]. High Power Laser and Particle Beams, 2005, 17.
In this paper Fe/Al alloy thin films were fabricated by pulse laser deposition(PLD), and the crystal phase, structure and micro-strain were studied. The deposition rate of films decreased with the increasing substrate temperature. The AFM pictures show that the films are compact and smooth. ICP (inductively coupled plasma) result of sample fabricated at 573 K substrate temperature shows Fe/Al atomic ratio is 1∶1. The X-ray diffraction results indicate that the crystal is Al0.5Fe0.5 with simple cube structure, the lattice constant is 0.297 nm, the average size of grains is 81.74 nm, and the average micro-distortion is 0.007 6. All above indicate that Al0.5Fe0.5 fabricated by PLD at 573 K has good crystallinity.
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