In this paper, the kinetics of XeF(C-A) laser were presented. The structures of the surface discharge optically pumping source and the laser devices were introduced. Experimental study and numerical simulation of XeF(CA) laser, as well as the detection of the density of XeF2 were summarized. The development of the radiative source technology was described. The energy deposition efficiency over 80% has been obtained on a module of impacted sectioned surface discharge source and the average deposit power density is about 27MW/cm. The framing photographs of discharge plasma channel under different conditions have been obtained. For multichannel discharge source, the symmetrical synchronous discharge and the photodissociation waves have been obtained.