Application of Penning discharge in vacuum-measuring of sealed vacuum device

Reliability of the sealed vacuum device is very important, and the main reason that affects reliability is its vacuum. As the degree of vacuum cannot be measured directly, an indirectly method is adopted in this paper. In this paper, the principle in measuring the vacuum of sealed vacuum device with Penning discharge is analyzed, the Penning discharge model of sealed vacuum device is established, the experimental device is designed, and pressure-ion current chart is presented.